The results of investigation of the phase composition, structure, and microhardness of vacuum ionplasma coatings based on Ti and Ni are presented. The influence of various factors, such as the chemical composition of the reaction medium, gas pressure, voltage, substrate temperature, and the separation of a plasma flow, is analyzed. The optimal parameters of the deposition of condensates are proposed.
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Translated from Fizyko-Khimichna Mekhanika Materialiv, Vol. 52, No. 3, pp. 105–110, May–June, 2016.
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Hasiy, O.B. Phase Composition, Structure, and Microhardness of Vacuum Ion-Plasma Coatings Based on Titanium and Nickel. Mater Sci 52, 414–420 (2016). https://doi.org/10.1007/s11003-016-9973-6
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DOI: https://doi.org/10.1007/s11003-016-9973-6