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Materials Science

, Volume 52, Issue 3, pp 414–420 | Cite as

Phase Composition, Structure, and Microhardness of Vacuum Ion-Plasma Coatings Based on Titanium and Nickel

Article
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The results of investigation of the phase composition, structure, and microhardness of vacuum ionplasma coatings based on Ti and Ni are presented. The influence of various factors, such as the chemical composition of the reaction medium, gas pressure, voltage, substrate temperature, and the separation of a plasma flow, is analyzed. The optimal parameters of the deposition of condensates are proposed.

Keywords

vacuum ion-plasma coatings phase composition structure microhardness Rietveld method March–Dollase function 

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Copyright information

© Springer Science+Business Media New York 2016

Authors and Affiliations

  1. 1.National Forestry Engineering University of UkraineLvivUkraine

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