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Thermal conductivity and interfacial effect of parylene C thin film using the 3-omega method

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Abstract

Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, we are interested in its thermal properties, and in particular the thermal conductivity of thin films. This later is determined by the so-called three-omega method. This technique makes use of a thin conducting strip, in contact with the material under test. The metal wire serves both as a heat source for applying a heat flux and a sensitive thermometer for measuring the surface temperature. The thermal conductivity of parylene C films of different thicknesses (210, 440 and 760 nm) deposited by CVD process on borosilicate substrates is investigated. It is demonstrated that the effective thermal conductivity increases as a function of the thickness of thin film (81.20 × 10−3, 88.37 × 10−3 and 92.81 × 10−3 W m−1 K−1 are measured, respectively). This effect is produced by the phonon scattering boundary at the interface between substrate/film and film/heater. To highlight the presence of contact thermal resistances and to estimate their value, a numerical approach, based on a finite element method using the software COMSOL® Multiphysics, is also proposed. This study shows that the main part (97%) of the interfacial thermal resistance is due to the contact between the parylene C film and the substrate.

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Abbreviations

\(R\) :

Resistance of the metal strip (Ω)

\(R_{0}\) :

Metal strip resistance at room temperature (Ω)

\(\Delta T\) :

Temperature variation in the metal strip (°C)

\(d_{\text{f}}\) :

Film thickness (m)

\(2b\) :

Width of the metal strip (m)

\(l\) :

Length of the metal strip (m)

\(q_{{\left({2\omega}\right)}}\) :

Thermal penetration depth (m)

\(\Delta T_{{{\text{s}}+{\text{f}}}}\) :

Temperature amplitude of the heater (substrate and film) (°C)

\(\Delta T_{\text{s}\left({2\omega }\right)}\) :

Amplitude temperature oscillation due to the substrate alone (°C)

\(\Delta T_{\text{f}}\) :

Temperature oscillation due to the presence of the thin film (°C)

\(P_{\text{rms}}\) :

Power per meter of length (W m−1)

\(k_{\text{s}}\) :

Substrate thermal conductivity (W m−1 K−1)

\(k_{\text{f}}\) :

Film thermal conductivity (W m−1 K−1)

\(k_{\text{eff}}\) :

Effective thermal conductivity (W m−1 K−1)

\(k_{\text{i}}\) :

Intrinsic thermal conductivity (W m−1 K−1)

\(D_{\text{s}}\) :

Thermal diffusivity of the substrate (m² s−1)

\(f_{\text{linear}}\) :

Frequency of the linear regime (Hz)

\(V_{{3\omega}}\) :

Third harmonic of the voltage (V)

\(V_{0}\) :

Initial voltage (V)

\(V_{{3\omega_{1} }}\) :

Third harmonic of the voltage at input current frequency \(\omega_{1}\) (V)

\(V_{{3\omega_{2} }}\) :

Third harmonic of the voltage at input current frequency \(\omega_{2}\) (V)

\(R_{\text{eff}}\) :

Effective thermal resistance (m2K W−1)

\(R_{\text{f}}\) :

Thermal resistance of the film (m2K W−1)

\(R_{\text{int}}\) :

Interfacial thermal resistance (m2K W−1)

H :

Coefficient of thermal convection (W m−2 K−1)

\(\beta_{\text{h}}\) :

Temperature coefficient of the resistance (TCR) of the heater (°C−1)

\(\xi\) :

Fitting constant having a value of roughly 0.923

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Authors and Affiliations

  1. Unité de Recherche Matériaux et Energies Renouvelables (URMER), Abou Bakr Belkaid University of Tlemcen, BP 119, 13000, Tlemcen, Algeria

    Amine Abdelkader Guermoudi & Amaria Ouldabbes

  2. Dep. Physics, Fac. Sciences, Abou Bakr Belkaid University of Tlemcen, BP 119, 13000, Tlemcen, Algeria

    Amine Abdelkader Guermoudi & Amaria Ouldabbes

  3. Univ. Lille, CNRS, Centrale Lille, Yncréa ISEN, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000, Lille, France

    Pierre Yves Cresson, Ghizlane Boussatour & Tuami Lasri

  4. Hassiba Benbouali University of Chlef, BP 151, Hay Es Salem, 02000, Chlef, Algeria

    Amine Abdelkader Guermoudi

  5. Univ. Artois, IUT Béthune, F-62408, Béthune, France

    Pierre Yves Cresson

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  1. Amine Abdelkader Guermoudi
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Guermoudi, A.A., Cresson, P.Y., Ouldabbes, A. et al. Thermal conductivity and interfacial effect of parylene C thin film using the 3-omega method. J Therm Anal Calorim 145, 1–12 (2021). https://doi.org/10.1007/s10973-020-09612-z

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