Abstract
This study reports the phase formation in the ternary thin films system Mo–W–Si. The metallic films were deposited onto Si (100) substrate by sputtering. Two kinds of samples were prepared, either by sequential deposition or by co-deposition. The phase formation was investigated by In situ X-ray diffraction measurements from 300 to 900 °C. The influence of the sample preparation, namely sequential deposition and co-deposition, on the mechanism of phase formation has been evidenced.
Similar content being viewed by others
References
Chow TP, Steckl AJ. Refractory metal silicides: thin-film properties and processing technology. IEEE Trans Electron Devices. 1983;30:1480–97.
McLachlan DR, Avins JB. Refractory metals silicides. Semicond Int. 1984;7:129–38.
Mochizuki T, Shibata K, Inoue T, Ohuchi K. A new MOS process using molybdenum disilicide as a gate material. Jpn J Appl Phys Suppl. 1978;17:37–42.
Crowder BL, Zirinsky S. 1 μm MOSFET VLSI technology: part VII—metal silicide interconnection technology—a future perspective. IEEE Trans Electron Devices. 1979;26:369–71.
Krakhmalev PV, Bergstron J. Tribological behavior and wear mechanisms of MoSi2-base composites sliding against AA6063 alloy at elevated temperature. Wear. 2006;260:450–7.
Subrahmanyam J, Rao RM. Combustion synthesis of MoSi2-WSi2 alloys. Mater Sci Eng A. 1994;183:205–10.
Zhang H, Chen P, Wang MJ, Kiu XW. Room-temperature mechanical properties of WSi2/MoSi2 composites. Rare Met. 2002;21:304–7.
Xu JG, Leng Y, Li HQ, Zhang H. Preparation and characterization of SiC/(Mo, W)Si2 composites from powders resulting from a SHS in a chemical oven. Int J Refract Met Hard Mater. 2009;27:74–7.
Guivarc’h A, Auvray P, Berthou L, Le Cun M, Boulet JP, Henoc P, Pelous G, Martinez A. Reaction kinetics of molybdenum thin films on silicon (111) surface. J Appl Phys. 1978;49:233–7.
d’Heurle FM, Petersson CS, Tsai MY. Observations on the hexagonal form of molybdenum silicide (MoSi2) and tungsten silicide (WSi2) films produced by ion implantation and on related snowplow effects. J Appl Phys. 1980;51:5976–80.
Murarka SP, Read MH, Chang CC. Hexagonal WSi2 in cosputtered (tungsten and silicon) mixture. J Appl Phys. 1981;52:7450–2.
Tsai MY, d’Heurle FM, Petersson CS, Johnson RW. Properties of tungsten silicide film of poly-crystalline silicon. J Appl Phys. 1981;52:5350–5.
Massalski TB. Binary alloy phase diagrams. Materials Park: ASM International; 1990.
Villars P, Prince A, Okamoto H. Handbook of ternary alloy phase diagrams. Materials Park: ASM International; 1995.
Villars P, Calvert LD. Pearson’s handbook of crystallographic data for intermetallic phases. Materials Park: ASM International; 1991.
Author information
Authors and Affiliations
Corresponding author
Additional information
It was presented at JEEP2010 Montpellier, France
Rights and permissions
About this article
Cite this article
Derafa, A., Record, MC., Mangelinck, D. et al. Reactive diffusion in W–Mo–Si thin films. J Therm Anal Calorim 103, 111–116 (2011). https://doi.org/10.1007/s10973-010-1136-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10973-010-1136-7