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New technology and application development of alkoxide-derived high purity alumina

  • Invited Paper: Industrial and technological applications of sol-gel and hybrid materials
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Abstract

High purity alumina, alumina with a purity of 99.99% or higher, has been widely used for various applications, for instance, ceramics, thermally conductive fillers, battery materials and sapphire single crystals. Among several manufacturing methods for high purity alumina, we have established mass-production technology using hydrolysis of aluminum alkoxide. In some applications of high purity alumina, there are technical problems to be solved. Two applications are described in this article. First, higher mechanical strength and corrosion resistance are required for ceramic parts of semiconductor manufacturing equipments. In order to obtain these properties, we have developed nano-sized α-alumina which has round and uniform particle shape with sharp particle size distribution. This alumina, NXA-150, can be sintered at a low temperature. Second, in the thermal interface material application, demands for electrical insulating and thermally conductive fillers are increasing. We have developed large size alumina (260 μm) which can reduce filler/resin interface and increase thermal conductivity of filler/resin composites.

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Highlights

  • We have established a technology for mass-producing high purity alumina by the aluminum alkoxide hydrolysis.

  • Fine alumina can produce dense sintered bodies for various applications such as semiconductor devices.

  • Large-size alumina can produce composites with high heat dissipation performance.

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Correspondence to Yoshiaki Sakatani.

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Sakamoto, S., Sakaki, S., Nakayama, A. et al. New technology and application development of alkoxide-derived high purity alumina. J Sol-Gel Sci Technol 104, 519–525 (2022). https://doi.org/10.1007/s10971-022-05851-8

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  • DOI: https://doi.org/10.1007/s10971-022-05851-8

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