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Characterization of tellurium dioxide thin films obtained through the Pechini method

  • Original Paper: Functional coatings, thin films and membranes (including deposition techniques)
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Abstract

Tellurium dioxide (TeO2) thin films were deposited on silicon substrates through the Pechini method, after which they were heat treated at different temperatures. The heat treatment temperatures were defined from the thermogravimetry-differential scanning calorimetry (TG-DSC) data of the precursor gel. The effects of the heat treatment on the structural properties were investigated through X-ray diffraction (XRD), atomic force microscopy, and Raman spectroscopy. The TG-DSC data showed four different weight loss steps due to the reduction of telluric acid to tellurium, the removal of the excess ethylene glycol, the decomposition of citric acid, and the degradation of polyester. The XRD and Raman data showed the presence of the γ- and α-TeO2 phases in the films treated at 400–500 °C. Lattice parameters of the observed crystalline phases were determined by Rietveld refinement, with which it was possible to evaluate the crystallite size and microstrain using the Williamson-Hall method. The heat treatment temperature directly influenced the crystallite size and the surface roughness of the films, which showed similar behaviors with the temperature.

Graphical abstract

Highlights

  • Good quality TeO2 thin films obtained through the Pechini method.

  • Phase transformation observed by different techniques.

  • Heat treatment temperature versus TeO2 crystalline phases.

  • The coexistence of α- and γ-TeO2 phases increases films´ strain.

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Funding

This work was supported by the Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (Finance Code 001), Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq) (Finance Code 307869/2015-6), and Fundação de Amparo à Pesquisa do Estado de São (Finance Code 17/13769-1).

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Authors and Affiliations

  1. Department of Physics and Chemistry, São Paulo State University (UNESP), Ilha Solteira, SP, Brazil

    Murilo Dobri Bataliotti, Francine Bettio Costa, Fernando Brondani Minussi, Eudes Borges Araújo & João Carlos Silos Moraes

  2. Center for Materials Science and Technology, Instituto de Pesquisas Energéticas e Nucleares, São Paulo, Brazil

    Nelson Batista de Lima

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  1. Murilo Dobri Bataliotti
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Contributions

Study conception and design were proposed by JCSM, MDB, and FBC. Material preparation and data collection were performed by MDB. The analysis were carried out by all authors. The first draft of the manuscript was written by MDB and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Francine Bettio Costa.

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Bataliotti, M.D., Costa, F.B., Minussi, F.B. et al. Characterization of tellurium dioxide thin films obtained through the Pechini method. J Sol-Gel Sci Technol 103, 378–385 (2022). https://doi.org/10.1007/s10971-022-05844-7

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  • DOI: https://doi.org/10.1007/s10971-022-05844-7

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