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Patterning of MgO epitaxial films on LaAlO3 substrate using photosensitive sol-gel method

  • Original Paper: Functional coatings, thin films and membranes (including deposition techniques)
  • Published:
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Abstract

Herein, the chelated precursor solution (Mg/BzAc) was synthesized using magnesium acetate as raw material and benzoylacetone as chemical modifier. The prepared solution was coated on (00 l)-oriented LaAlO3 (LAO) single crystal substrate to fabricate the MgO/BzAc gel films. First, ultraviolet absorption spectroscopy was employed to analyze the ultraviolet photosensitivity of the MgO/BzAc gel films and the characteristic absorption peak corresponding to π-π* transition in Mg/BzAc chelate rings was detected at the wavelength of 329 nm. It is found that the intensity of this peak decreased gradually with increase in UV irradiation time, which indicates that the MgO/BzAc gel films exhibit good ultraviolet photosensitive properties. Then, MgO crystalline films with biaxial texture were prepared by heat-treating MgO/BzAc gel films at 850 °C in air for 60 min. Finally, micro-patterned MgO films with biaxial textures were prepared on the LAO substrate using photosensitive sol-gel lithography in combination with the above heat-treatment process.

Highlights

  • Mg/BzAc was synthesized using photosensitive sol–gel method.

  • The MgO/BzAc gel films exhibit good ultraviolet photosensitive properties.

  • The micro-patterned MgO films with biaxial textures were prepared on the LAO substrate.

  • The direct micro-patterning of MgO films was achieved in one-step.

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Acknowledgements

The authors are grateful for the financial support of the National Natural Science Foundation of China (Grant No. 51672212), Key Research and Development Program of Shaanxi Province - International Science and Technology Cooperation Project (No. 2020KW-039), and Major Science and Technology Projects of Shaanxi Province (No. 2020zdzx04-04-02). This work was in part supported by the Youth Innovation Team of Shaanxi Universities.

Author contributions

All authors contributed to the study conception and design. Li LM performed the methodology, analysis, and investigation. Both ZGY and LL checked the supervision, writing, review, and editing. All authors read and approved the final paper.

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Authors and Affiliations

  1. School of Material Science and Engineering, Xi’an University of Technology, Xi’an, 710048, Shaanxi, China

    Limin Li, Gaoyang Zhao & Li Lei

  2. Advanced Material Analysis and Test Center, Xi’an University of Technology, Xi’an, 710048, Shaanxi, China

    Gaoyang Zhao & Li Lei

  3. Northwest Institute for Nonferrous Metal Research, Xi’an, 710016, Shaanxi, China

    Chengshan Li

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  1. Limin Li
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  2. Gaoyang Zhao
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Correspondence to Gaoyang Zhao or Li Lei.

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Li, L., Zhao, G., Lei, L. et al. Patterning of MgO epitaxial films on LaAlO3 substrate using photosensitive sol-gel method. J Sol-Gel Sci Technol 100, 414–422 (2021). https://doi.org/10.1007/s10971-021-05646-3

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  • DOI: https://doi.org/10.1007/s10971-021-05646-3

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