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Sol–gel synthesis of PZT thin films on FTO glass substrates for electro-optic devices

  • Ali Shoghi
  • Hossein AbdizadehEmail author
  • Amid Shakeri
  • Mohammad Reza GolobostanfardEmail author
Original Paper: Sol-gel and hybrid materials for dielectric, electronic, magnetic and ferroelectric applications
  • 19 Downloads

Abstract

The optoferroelectric materials have attracted a great deal of attention in recent years. Lead zirconate titanate (PZT) thin films are fabricated on FTO glass substrates by sol–gel technique to investigate optical properties of the films. Heat treatment conditions and sol parameters are investigated to determine the optimum condition for fabricating the PZT thin films. Crack free almost pure perovskite crystal structure is formed at calcination temperature of 600 °C, for 5 min, and sol concentration of 0.33 mol/l. Increasing thickness of thin films raises the grain size and average roughness from 30 to 105 nm and 2.36 to 5.48 nm, respectively. FTIR analysis shows that 600 °C is an appropriate temperature for crystallization of PZT thin films due to the existence of metallic bond (M–O–M) in the spectrum. The films are characterized at different thicknesses for optical transmission and electrical investigation. Value of bandgap energy is estimated to be about 3.5 eV. It has been shown that the presence of rosette-type perovskite structure in the pyrochlore background has negative effect on capacitance and resistance of PZT films.

Highlight

  • PZT film with almost pure perovskite structure is successfully synthesized via sol-gel method on FTO substrate.

  • Optimum condition for PZT film deposition is 0.33 M sol, heat treated at 600 °C for 5 min.

  • The average roughness value of PZT films with 4 and 16 layers are 2.36 and 5.48 nm, respectively.

  • UV-Vis spectra demonstrate high transmittance and the value of band gap energy is 3.5 eV.

Keywords

PZT Sol–gel processing Thin film Perovskite structure Optical measurements 

Notes

Compliance with ethical standards

Conflict of interest

The authors declare that they have no conflict of interest.

Supplementary material

10971_2019_5121_MOESM1_ESM.docx (1.5 mb)
Supplementary information.

References

  1. 1.
    Kim SH, Yang JS, Koo CY et al. (2003) Dielectric and electromechanical properties of Pb(Zr,Ti)O3 thin films for piezo-microelectromechanical system devices. Jpn J Appl Phys 42:5952–5955.  https://doi.org/10.1143/JJAP.42.5952 CrossRefGoogle Scholar
  2. 2.
    Setter N, Damjanovic D, Eng L et al. (2006) Ferroelectric thin films: review of materials, properties, and applications. J Appl Phys 100:  https://doi.org/10.1063/1.2336999
  3. 3.
    Pontes FM, Leite ER, Nunes MSJ et al. (2004) Preparation of Pb(Zr,Ti)O3 thin films by soft chemical route. J Eur Ceram Soc 24:2969–2976.  https://doi.org/10.1016/S0955-2219(03)00318-2 CrossRefGoogle Scholar
  4. 4.
    Zhou Z, Bowland CC, Patterson BA et al. (2016) Conformal BaTiO3 films with high piezoelectric coupling through an optimized hydrothermal synthesis. ACS Appl Mater Interfaces 8:21446–21453.  https://doi.org/10.1021/acsami.6b05700 CrossRefGoogle Scholar
  5. 5.
    Naciri J, Shenoy DK, Keller P et al. (2002) Synthesis and pyroelectric properties of novel ferroelectric organosiloxane liquid crystalline materials. Chem Mater 14:5134–5139.  https://doi.org/10.1021/cm0207200 CrossRefGoogle Scholar
  6. 6.
    Weigel R, Morgan DP, Owens JM et al. (2002) Microwave acoustic materials, devices, and applications. IEEE Trans Microw Theory Tech 50:738–749.  https://doi.org/10.1109/22.989958 CrossRefGoogle Scholar
  7. 7.
    Zhao H, Ren W, Liu X (2017) Design and fabrication of micromachined pyroelectric infrared detector array using lead titanate zirconate (PZT) thin film. Ceram Int 43:S464–S469.  https://doi.org/10.1016/j.ceramint.2017.05.205 CrossRefGoogle Scholar
  8. 8.
    George JP, Smet PF, Botterman J et al. (2015) Lanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: toward integrated active nanophotonic devices. ACS Appl Mater Interfaces 7:13350–13359.  https://doi.org/10.1021/acsami.5b01781 CrossRefGoogle Scholar
  9. 9.
    Yi G, Wu Z, Sayer M (1988) Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: electrical, optical, and electro‐optic properties. J Appl Phys 64:2717–2724.  https://doi.org/10.1063/1.341613 CrossRefGoogle Scholar
  10. 10.
    Yuan Y, Xiao Z, Yang B, Huang J (2014) Arising applications of ferroelectric materials in photovoltaic devices. J Mater Chem A 2:6027–6041.  https://doi.org/10.1039/c3ta14188h CrossRefGoogle Scholar
  11. 11.
    Zhao QL, He GP, Di JJ et al. (2017) Flexible semitransparent energy harvester with high pressure sensitivity and power density based on laterally aligned PZT single-crystal nanowires. ACS Appl Mater Interfaces 9:24696–24703.  https://doi.org/10.1021/acsami.7b03929 CrossRefGoogle Scholar
  12. 12.
    Wu W, Bai S, Yuan M et al. (2012) Lead zirconate titanate nanowire textile nanogenerator for wearable energy-harvesting and self-powered devices. ACS Nano 6:6231–6235.  https://doi.org/10.1021/nn3016585 CrossRefGoogle Scholar
  13. 13.
    Shakeri A, Abdizadeh H, Golobostanfard MR (2014) Synthesis and characterization of thick PZT films via sol-gel dip coating method. Appl Surf Sci 314:711–719.  https://doi.org/10.1016/j.apsusc.2014.07.087 CrossRefGoogle Scholar
  14. 14.
    Thomas R, Mochizuki S, Mihara T, Ishida T (2002) Effect of substrate temperature on the crystallization of Pb(Zr,Ti)O3 films on Pt/Ti/Si substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target. Mater Sci Eng B 95:36–42.  https://doi.org/10.1016/S0921-5107(02)00161-7 CrossRefGoogle Scholar
  15. 15.
    Hlubucek J, Vapenka D, Horodyska P, Vaclavik J (2016) Control of chemical composition of PZT thin films produced by ion-beam deposition from a multicomponent target. 10151:101510S.  https://doi.org/10.1117/12.2257331
  16. 16.
    Okamoto S, Sankara Rama Krishnan PS, Okamoto S et al. (2017) In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr,Ti)O3 films grown on (100) Si substrates by metal organic chemical vapor deposition. Jpn J Appl Phys 56:  https://doi.org/10.7567/JJAP.56.10PF12
  17. 17.
    Meidong L, Chum-u L, Peiying W et al. (1995) Preparation of PZT ferroelectric thin films by sol-gel processing and their properties. Sens Actuators A Phys 49:191–194.  https://doi.org/10.1016/0924-4247(95)01027-0 CrossRefGoogle Scholar
  18. 18.
    Shakeri A, Abdizadeh H, Golobostanfard MR (2017) Synthesizing nanostructured crack-free thick films of Fe-doped lead zirconate titanate by sol–gel dip coating method. J Sol–Gel Sci Technol 81:814–823.  https://doi.org/10.1007/s10971-016-4223-9 CrossRefGoogle Scholar
  19. 19.
    Li Q, Wang X, Wang F et al. (2018) Effect of neodymium substitution on crystalline orientation, microstructure and electric properties of sol–gel derived PZT thin films. Ceram Int 44:7709–7715.  https://doi.org/10.1016/j.ceramint.2018.01.197 CrossRefGoogle Scholar
  20. 20.
    Zhang YJ, Wang ZJ, Bai Y et al. (2018) Enhanced electrical properties of epitaxial PZT films deposited by sol–gel method and crystallized by microwave irradiation. J Alloy Compd 757:24–30.  https://doi.org/10.1016/j.jallcom.2018.05.047 CrossRefGoogle Scholar
  21. 21.
    Cheng J, He L, Che L, Meng Z (2006) Lead zirconate titanate thin films prepared on metal substrates by the sol-gel methods. Thin Solid Films 515:2398–2402.  https://doi.org/10.1016/j.tsf.2006.05.001 CrossRefGoogle Scholar
  22. 22.
    Bel-Hadj-Tahar R (2017) Morphological and electrical investigations of lead zirconium titanate thin films processed at low temperature by a novel sol-gel system. J Alloy Compd 729:607–616.  https://doi.org/10.1016/j.jallcom.2017.09.222 CrossRefGoogle Scholar
  23. 23.
    Zhu Y, Ren T, Zhang N (2007) Effect of annealing temperature on properties of sputtered PZT thin films. Integr Ferroelectr 90:3.  https://doi.org/10.1080/10584580601099041 CrossRefGoogle Scholar
  24. 24.
    Liang K, Buditama A, Chien D, et al. (2015) The conductivity mechanism and an improved CV model of ferroelectric PZT thin film. J Appl Phys 117:  https://doi.org/10.1063/1.4919431
  25. 25.
    Wang ZD, Lai ZQ, Hu ZG (2014) Low-temperature preparation and characterization of the PZT ferroelectric thin films sputtered on FTO glass substrate. J Alloy Compd 583:452–454.  https://doi.org/10.1016/j.jallcom.2013.08.197 CrossRefGoogle Scholar
  26. 26.
    Poznyak SK, Kulak AI (2014) Optical and photoelectrochemical properties of lead zirconate titanate thin films obtained by the sol–gel method. J Appl Spectrosc 81:866–872.  https://doi.org/10.1007/s10812-014-0019-2 CrossRefGoogle Scholar
  27. 27.
    Cheng TD, Zhou NJ, Li P (2015) Ferroelectric and photoelectricity properties of (Pb0.52Zr0.48)TiO3 thin films fabricated on FTO glass substrate. J Mater Sci Mater Electron 26:7104–7108.  https://doi.org/10.1007/s10854-015-3332-5 CrossRefGoogle Scholar
  28. 28.
    Shoghi A, Shakeri A, Abdizadeh H, Golobostanfard MR (2015) Synthesis of crack-free PZT thin films by sol–gel processing on glass substrate. Procedia Mater Sci 11:386–390.  https://doi.org/10.1016/j.mspro.2015.11.136 CrossRefGoogle Scholar
  29. 29.
    Marincel DM, Jesse S, Belianinov A et al. (2015) A-site stoichiometry and piezoelectric response in thin film PbZr1-xTixO3. J Appl Phys 117:0–8.  https://doi.org/10.1063/1.4921869 CrossRefGoogle Scholar
  30. 30.
    Bhaskar A, Chang TH, Chang HY, Cheng SY (2009) Pb(Zr0.53Ti0.47)O3 thin films with different thicknesses obtained at low temperature by microwave irradiation. Appl Surf Sci 255:3795–3800.  https://doi.org/10.1016/j.apsusc.2008.10.043 CrossRefGoogle Scholar
  31. 31.
    Bruncková H, Medvecký Ľ, Hvizdoš P (2011) Effect of sol-gel preparation method on particle morphology in pure and nanocomposite PZT thin films. Chem Pap 65:682–690.  https://doi.org/10.2478/s11696-011-0051-0 CrossRefGoogle Scholar
  32. 32.
    Yang J, Jianbin L (2005) Processing and thickness effects on the microstructure and electrical properties of sol-gel deposited Pb(Zr, Ti)O3 films. Sens Actuators A Phys 121:103–112.  https://doi.org/10.1016/j.sna.2004.12.009 CrossRefGoogle Scholar
  33. 33.
    Jeffrey C, Brinker GWS (1990) Sol–gel science: the physics and chemistry of sol–gel processing. 5th, illustr ed. Academic Press, San Diego, CAGoogle Scholar
  34. 34.
    Zhong J, Batra V, Han H et al. (2015) Effect of Pb content and solution concentration of PbxTiO3 seed layer on {100}-texture and ferroelectric/dielectric behavior of PZT (52/48) thin films. J Vac Sci Technol A 33:05E119.  https://doi.org/10.1116/1.4927161 CrossRefGoogle Scholar
  35. 35.
    Ozer N (1994) Sol–gel optics. Springer US, Boston, MAGoogle Scholar
  36. 36.
    Losego MD, Ihlefeld JF, Maria J (2008) Importance of Solution chemistry in preparing sol–gel PZT thin films directly on copper surfaces. Chem Mater 20:303–307.  https://doi.org/10.1021/cm070999q CrossRefGoogle Scholar
  37. 37.
    Shakeri A, Abdizadeh H, Golobostanfard MR (2012) Effects of calcination parameters on the microstructure and morphology of PZT nanoparticles prepared by modified sol–gel method. Adv Mater Res 576:326–329.  https://doi.org/10.4028/www.scientific.net/AMR.576.326 CrossRefGoogle Scholar
  38. 38.
    Zhu W, Liu ZQ, Tse MS, Tan HS (1995) Raman, FT-IR and dielectric studies of PZT 40/60 films deposited by MOD technology. J Mater Sci Mater Electron 6:369–374.  https://doi.org/10.1007/BF00144636 CrossRefGoogle Scholar
  39. 39.
    Birnie DP (2000) Esterification kinetics in titanium isopropoxide-acetic acid solutions. J Mater Sci 35:367–374.  https://doi.org/10.1023/A:1004770007284 CrossRefGoogle Scholar
  40. 40.
    Zak AK, Majid WHA (2010) Synthesis and characterization of sol-gel derived single-phase PZT nanoparticles in aqueous polyol solution. J Optoelectron Adv Mater 12:1714–1719Google Scholar
  41. 41.
    Shakeri A, Abdizadeh H, Golobostanfard MR (2013) An investigation of solvent effect on rhombohedral/monoclinic/tetragonal phase properties of Pb(Zr0.53Ti0.47)O3 nanoparticles prepared via sol–gel method. Adv Mater Res 829:698–702.  https://doi.org/10.4028/www.scientific.net/AMR.829.698 CrossRefGoogle Scholar
  42. 42.
    Frantti J, Lantto V (1997) Structural studies of Nd-modified lead zirconate titanate ceramics between 11 and 680 K at the morphotropic phase boundary. Phys Rev B 56:221–236.  https://doi.org/10.1103/PhysRevB.56.221 CrossRefGoogle Scholar
  43. 43.
    Yu J, Zhao X, Zhao Q (2000) Effect of film thickness on the grain size and photocatalytic activity of the sol–gel derived nanometer TiO2 thin films. J Mater Sci Lett 19:1015–1017.  https://doi.org/10.1023/A:1006705316651 CrossRefGoogle Scholar
  44. 44.
    Park G-T, Park C, Choi J et al. (2006) Effects of thickness on piezoelectric properties of highly oriented lead zirconate titanate films. J Am Ceram Soc 2316:060427083300082.  https://doi.org/10.1111/j.1551-2916.2006.00988.x CrossRefGoogle Scholar
  45. 45.
    Pandey SK, James AR, Raman R et al. (2005) Structural, ferroelectric and optical properties of PZT thin films. Phys B Condens Matter 369:135–142.  https://doi.org/10.1016/j.physb.2005.08.024 CrossRefGoogle Scholar
  46. 46.
    Bgst T, Films T, Setiabudhi J, Bandung N (2008) Electrical conductivity and surface roughness properties of ferroelectric gallium. Doped 19:4–6Google Scholar
  47. 47.
    Jeng Y, Tsai P, Fang T (2003) Nanomeasurement and fractal analysis of PZT ferroelectric thin films by atomic force microscopy. Microelectron Eng 65:406–415.  https://doi.org/10.1016/S0167-9317(03)00052-2 CrossRefGoogle Scholar
  48. 48.
    Peng CH, Desu SB (1994) Modified envelope method for obtaining optical properties of weakly absorbing thin films and its application to thin films of Pb(Zr,Ti)O3 solid solutions. J Am Ceram Soc 77:929–938.  https://doi.org/10.1111/j.1151-2916.1994.tb07249.x CrossRefGoogle Scholar
  49. 49.
    Das NS, Ghosh PK, Mitra MK, Chattopadhyay KK (2010) Effect of film thickness on the energy band gap of nanocrystalline CdS thin films analyzed by spectroscopic ellipsometry. Phys E Low-Dimens Syst Nanostruct 42:2097–2102.  https://doi.org/10.1016/j.physe.2010.03.035 CrossRefGoogle Scholar
  50. 50.
    Kheyrdan A, Abdizadeh H, Shakeri A, Golobostanfard MR (2018) Structural, electrical, and optical properties of sol-gel-derived zirconium-doped barium titanate thin films on transparent conductive substrates. J Sol–Gel Sci Technol 86:141–150.  https://doi.org/10.1007/s10971-018-4610-5 CrossRefGoogle Scholar
  51. 51.
    Warren WL, Dimos D, Waser RM (1996) Degradation mechanisms in ferroelectric and high-permittivity perovskites. MRS Bull 21:40–45.  https://doi.org/10.1557/S0883769400035909 CrossRefGoogle Scholar
  52. 52.
    Holzlechner G, Kastner D, Slouka C et al. (2014) Oxygen vacancy redistribution in PbZrxTi1−xO3 (PZT) under the influence of an electric field. Solid State Ion 262:625–629.  https://doi.org/10.1016/j.ssi.2013.08.027 CrossRefGoogle Scholar
  53. 53.
    Waser R, Baiatu T, Hardtl K-H (1990) dc Electrical Degradation of Perovskite-Type Titanates: I, Ceramics. J Am Ceram Soc 73:1645–1653.  https://doi.org/10.1111/j.1151-2916.1990.tb09809.x CrossRefGoogle Scholar
  54. 54.
    Yoon S-H, Park Y-S, Hong J-O, Sinn D-S (2007) Effect of the pyrochlore (Y2Ti2O7) phase on the resistance degradation in yttrium-doped BaTiO3 ceramic capacitors. J Mater Res 22:2539–2543.  https://doi.org/10.1557/jmr.2007.0326 CrossRefGoogle Scholar

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Authors and Affiliations

  1. 1.School of Metallurgy and Materials Engineering, College of EngineeringUniversity of TehranTehranIran
  2. 2.Center of Excellence for High Performance MaterialsUniversity of TehranTehranIran

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