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Solvothermal synthesis of indium-doped zinc oxide TCO films

  • Original Paper: Functional coatings, thin films and membranes (including deposition techniques)
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Abstract

This paper outlines the preparation of indium-doped zinc oxide films via solvothermal synthesis of nanoparticles, followed by spin coating of the transparent conductive oxide (TCO) layer. The effect of stabilizer type and its concentration on the suspension stability was studied. The influence of the In/Zn molar ratio (in the 0–0.06 range) on the lattice parameters and the cell volume was determined by XRD analysis. A linear change in these parameters was found, indicating a uniform integration of the indium into the ZnO crystal. Thermal analysis using TGA/DTA pointed to the optimal thermal treatment of the TCO layers at 500 °C. In addition, the effect of the molar ratio on the optical and electrical properties was studied. A minimal sheet resistance of <46 ohm/square and optical transparency of >85 % at In/Zn = 0.04 were achieved. The above findings indicate that the solvothermal route can be very effective in the synthesis of state-of-the-art TCO coatings.

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References

  1. Beyer W, Hüpkes J, Stiebig H (2007) Thin Solid Films 516:147–154

    Article  Google Scholar 

  2. Ehrlich DJ, Tsao JY (eds) (1989) Laser microfabrication: thin film processes and lithography. Academic Press Inc, San Diego

    Google Scholar 

  3. Middleman S, Hochberg AK (1993) Process engineering analysis in semiconductor device fabrication. McGraw-Hill, New York

    Google Scholar 

  4. Ellmer K (2000) J Phys D Appl Phys 33:R17–R32

    Article  Google Scholar 

  5. Kawashima T, Matsui H, Tanabe N (2003) Thin Solid Films 445:241–244

    Article  Google Scholar 

  6. Singh AV, Mehra RM, Buthrath N, Wakahara A, Yoshida A (2001) J Appl Phys 90:5661–5665

    Article  Google Scholar 

  7. Choi CG, Seo S-J, Bae B-S (2008) Electrochem Solid State Lett 11:H7–H9

    Article  Google Scholar 

  8. Lee J-H, Ko K-H, Park B-O (2003) J Cryst Growth 247:119–125

    Article  Google Scholar 

  9. Lee S-Y, Park B-O (2005) Thin Solid Films 484:184–187

    Article  Google Scholar 

  10. Lee J-H, Park B-O (2003) Thin Solid Films 426:94–99

    Article  Google Scholar 

  11. Cimitan S, Albonetti S, Forni L, Peri F, Lazzari D (2009) J Colloid Interface Sci 329:73–80

    Article  Google Scholar 

  12. Brehm JU, Winterer M, Hahn H (2006) J Appl Phys 100:64311 (9pp)

    Article  Google Scholar 

  13. Xing GZ, Yao B, Cong CX, Yang T, Xie YP, Li BH, Shen DZ (2008) J Alloys Compd 457:36–41

    Article  Google Scholar 

  14. Shannon RD (1976) Acta Crystallogr Sect A Found Crystallogr 32:751–767

    Google Scholar 

  15. Feng ZC (2012) Handbook of zinc oxide and related materials: vol. 1, materials. CRC Press, Boca Raton

    Google Scholar 

  16. Shinde SS, Shinde PS, Bhosale CH, Rajpure KY (2008) J Phys D Appl Phys 41:105–109 (6pp)

    Google Scholar 

  17. Tauc J, Grigorovici R, Vancu A (1966) Phys Status Solidi 15:627–637

    Article  Google Scholar 

  18. Srikant V, Clarke DR (1998) J Appl Phys 83:5447–5451

    Article  Google Scholar 

Download references

Acknowledgments

The authors acknowledge the generous support of the Nancy and Stephen Grand Technion Energy Program (GTEP), the Leona M. and Harry B. Helmsley Charitable Trust and the Russel Berrie Nanotechnology Institute (RBNI). GES acknowledges the Committee for Planning and Budgeting of the Council for Higher Education under the framework of the KAMEA program. GSG also acknowledges support from the Gruenbaum chair in Materials Engineering.

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Correspondence to G. S. Grader.

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Dinner, O., Shter, G.E. & Grader, G.S. Solvothermal synthesis of indium-doped zinc oxide TCO films. J Sol-Gel Sci Technol 81, 3–10 (2017). https://doi.org/10.1007/s10971-016-4153-6

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  • DOI: https://doi.org/10.1007/s10971-016-4153-6

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