Skip to main content
SpringerLink
Log in

Hard X-rays and soft-matter: processing of sol–gel films from a top down route

  • Original Paper
  • Published:
Journal of Sol-Gel Science and Technology Aims and scope Submit manuscript

Abstract

A current trend of applied research in the field of nanomaterials is the integration of bottom up and top down fabrication methods. Sol–gel chemistry is widely applied to obtain different functional materials from a bottom up route, especially in the case of thin films. To fabricate devices based on sol–gel films, which include nanocomposites and mesoporous ordered materials, application of lithography technologies is mandatory. Among the different lithographic approaches, photolithography is widely used by companies using micro-fabrication processes. In this context, photolithography is a typical top down method that requires to be integrated as much as possible with deposition of thin films from a liquid phase. Recently we have developed a new integrated fabrication method which uses high energy photons, such as hard X-rays, which typically have energies between 2.5 and 12 keV, for the manipulation and production of a large variety of functional materials and devices. In the present review a short overview of such achievements is presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  1. Brinker CJ, Scherer GW (1990) Sol–gel science. Academic Press, Waltham

    Google Scholar 

  2. Van de Leest RE (1995) Appl Surf Sci 86:278

    Article  Google Scholar 

  3. Bohannan EW, Gao XR, Gaston KR, Doss CD, Sotiriou-Leventis C, Leventis N (2002) J Sol–Gel Sci Technol 23:235

    Article  Google Scholar 

  4. Ma JH, Wu GM, Shen J, Wang J (2001) J Inorg Mater 16:1174

    Google Scholar 

  5. Soppera A, Feullade M, Croutxé-Barghon C, Carré C (2005) Prog Solid State Chem 33:233

    Article  Google Scholar 

  6. Innocenzi P, Brusatin G (2004) J Non-Cryst Solids 333:137

    Article  Google Scholar 

  7. Costacurta S, Malfatti L, Falcaro P, Innocenzi P (2007) J Sol–Gel Sci Technol 44:59

    Article  Google Scholar 

  8. Kang DJ, Park GU, Lee HH, Park HY, Park J-U (2013) Curr Appl Phys 13:1732

    Article  Google Scholar 

  9. Brusatin G, Della Giustina G, Guglielmi M, Innocenzi P (2006) Prog Solid State Chem 34:223

    Article  Google Scholar 

  10. Asahi Glass Co. Ltd. (1993) Jpn Pat 05080205-A

  11. Hitachi Ltd. (1992) Eur Pat Appl No. 0533030 A2

  12. Kintaka K, Nishii J, Tohge N (2000) Appl Opt 39:489

    Article  Google Scholar 

  13. Lasagni AS, Seyler M, Holzapfel C, Maier WF, Mucklich F (2005) Adv Mater 17:2228

    Article  Google Scholar 

  14. Innocenzi P, Malfatti L, Kidchob T, Costacurta S, Falcaro P, Marmiroli B, Cacho-Nerin F, Amenitsch H (2011) J Synchrotron Radiat 18:280

    Article  Google Scholar 

  15. Brusatin G, Della Giustina G, Romanato F, Guglielmi M (2008) Nanotechnology 19:175306

    Article  Google Scholar 

  16. Tirumala VR, Divan R, Mancini DC, Caneba GT (2005) Microsyst Technol 11:347

    Article  Google Scholar 

  17. Hikemet RAM, Thomassen R (2003) Adv Mater 15:115

    Article  Google Scholar 

  18. Kruk M, Jaroniec M, Sakamoto Y, Terasaki O, Ryoo R, Ko H (2000) J Phys Chem B 104:292

    Article  Google Scholar 

  19. Werst DW, Vinokur EI (2001) J Phys Chem B 105:1587

    Article  Google Scholar 

  20. Falcaro P, Innocenzi P (2011) J Sol–Gel Sci Technol 57:236

    Article  Google Scholar 

  21. Cheng Y, Kuo N-Y, Su H (1997) Rev Sci Instrum 68:2163

    Article  Google Scholar 

  22. Wang J, Morin C, Li L, Hitchcock AP, Scholl A, Doran A (2009) J Electron Spectrosc Relat Phenom 170:25

    Article  Google Scholar 

  23. Saile V, Wallrabe U, Tabata O, Korvink JG (2009) Advanced micro and nanosystems, LIGA and its application. WILEY-VCH, Weinheim

    Google Scholar 

  24. Weon BM, Kwon YB, Won KH, Yoo J, Je JH, Li M, Hahn JH (2010) Chem Phys Chem 11:115

    Article  Google Scholar 

  25. Falcaro P, Costacurta S, Malfatti L, Buso D, Patelli A, Schiavuta P, Piccinini M, Grenci G, Marmiroli B, Amenitsch H, Innocenzi P (2011) ACS Appl Mater Interfaces 3:245

    Article  Google Scholar 

  26. Costacurta S, Malfatti L, Patelli A, Falcaro P, Amenitsch H, Marmiroli N, Grenci G, Piccinini M, Innocenzi P (2010) Plasma Process Polym 7:459

    Article  Google Scholar 

  27. Innocenzi P, Brusatin G (2001) Chem Mater 13:3126

    Article  Google Scholar 

  28. Innocenzi P, Falcaro P, Schergna S, Maggini M, Menna E, Amenitsch H, Grosso D, Soler Illia G, Sanchez C (2004) J Mater Chem 14:1838

    Article  Google Scholar 

  29. Pinna A, Malfatti L, Piccinini M, Falcaro P, Innocenzi P (2012) J Synchrotron Radiat 19:586

    Article  Google Scholar 

  30. Cataldo F (1993) Fuller Sci Technol 8:577

    Article  Google Scholar 

  31. Fam DWH, Palaniappan A, Tok AIY, Liedberg B, Moochhala SM (2011) Sens Actuators B 157:1

    Article  Google Scholar 

  32. Dumée LF, Sears K, Marmiroli B, Amenitsch H, Duan X, Lamb R, Buso D, Huynh C, Hawkins S, Kentish S, Duke M, Gray S, Innocenzi P, Hill AJ, Falcaro P (2013) Carbon 51:427

    Article  Google Scholar 

  33. Innocenzi P, Kidchob T, Costacurta S, Falcaro P, Marmiroli B, Cacho-Nerin F, Amenitsch H (2010) Soft Matter 6:3172

    Article  Google Scholar 

  34. Innocenzi P, Malfatti L, Kidchob T, Costacurta S, Falcaro P, Piccinini M, Marcelli A, Morini P, Sali D, Amenitsch H (2007) J Phys Chem C 111:5345

    Google Scholar 

  35. Soler-Illia GJAA, Innocenzi P (2006) Chem Eur J 12:4478

    Article  Google Scholar 

  36. Soler-Illia GJAA, Crepaldi EL, Grosso D, Sanchez C (2003) Curr Opin Colloid Interface Sci 8:109

    Article  Google Scholar 

  37. Innocenzi P, Kidchob T, Falcaro P, Takahashi M (2008) Chem Mater 20:607

    Article  Google Scholar 

  38. Falcaro P, Costacurta S, Malfatti L, Takahashi M, Kidchob T, Casula MF, Piccinini M, Marcelli A, Marmiroli B, Amenitsch H, Schiavuta P, Innocenzi P (2008) Adv Mater 20:1864

    Article  Google Scholar 

  39. Falcaro P, Malfatti L, Kidchob T, Giannini G, Falqui A, Casula MF, Amenitsch H, Marmiroli B, Grenci G, Innocenzi P (2009) Chem Mater 21:2055

    Article  Google Scholar 

  40. Doherty CM, Gao Y, Marmiroli B, Amenitsch H, Lisi F, Malfatti L, Okada K, Takahashi M, Hill AJ, Innocenzi P, Falcaro P (2012) J Mater Chem 22:16191

    Article  Google Scholar 

  41. Han SH, Doherty CM, Marmiroli B, Jo HJ, Buso D, Patelli A, Schiavuta P, Innocenzi P, Lee YM, Thornton AW, Hill AJ, Falcaro P (2013) Small 9:2277

    Article  Google Scholar 

  42. Falcaro P, Malfatti L, Vaccari L, Amenitsch H, Marmiroli B, Grenci G, Innocenzi P (2009) Adv Mater 21:4932

    Article  Google Scholar 

  43. Costacurta S, Falcaro P, Malfatti L, Marongiu D, Marmiroli B, Cacho-Nerin F, Amenitsch H, Kirkby N, Innocenzi P (2011) ACS Appl Mater Interfaces 27:3898

    Google Scholar 

  44. Malfatti L, Falcaro P, Pinna A, Lasio B, Casula MF, Loche D, Falqui A, Marmiroli B, Amenitsch H, Sanna R, Mariani A, Innocenzi P (2013) ACS Appl Mater Interfaces. doi:10.1021/am4027407

  45. Malfatti L, Marongiu D, Costacurta S, Falcaro P, Amenitsch H, Marmiroli B, Grenci G, Casula M, Innocenzi P (2010) Chem Mater 22:2132

    Article  Google Scholar 

  46. Malfatti L, Falcaro P, Marmiroli B, Amenitsch H, Piccinini M, Falqui A, Innocenzi P (2011) Nanoscale 3:3760

    Article  Google Scholar 

  47. Pinna A, Lasio B, Piccinini M, Marmiroli B, Amenitsch H, Falcaro P, Tokudome Y, Malfatti L, Innocenzi P (2013) ACS Appl Mater Interfaces 5:3168

    Article  Google Scholar 

  48. Dimitrakakis C, Marmiroli B, Amenitsch H, Malfatti L, Innocenzi P, Grenci G, Vaccari L, Hill AJ, Ladewig BP, Hill MR, Falcaro P (2012) Chem Commun 48:7483

    Article  Google Scholar 

  49. Faustini M, Marmiroli B, Malfatti L, Louis B, Krins N, Falcaro P, Grenci G, Laberty-Robert C, Amenitsch H, Innocenzi P, Grosso D (2011) J Mater Chem 21:3597

    Article  Google Scholar 

Download references

Acknowledgments

The RAS is kindly acknowledged for funding through CRP 26449 P.O.R. FSE 2007–2013, L.R.7/2007.

Author information

Authors and Affiliations

  1. Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), D.A.D.U., Università di Sassari and CR-INSTM, Palazzo Pou Salit, Piazza Duomo 6, 07041, Alghero, Sassari, Italy

    Plinio Innocenzi & Luca Malfatti

  2. Institute of Inorganic Chemistry, Graz University of Technology, Stremayrgasse 9/IV, 8010, Graz, Austria

    Benedetta Marmiroli

  3. Division of Materials Science and Engineering, CSIRO, Private Bag 33, Clayton South MDC, Clayton, 3169, Australia

    Paolo Falcaro

Authors
  1. Plinio Innocenzi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Luca Malfatti
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Benedetta Marmiroli
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Paolo Falcaro
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Plinio Innocenzi.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Innocenzi, P., Malfatti, L., Marmiroli, B. et al. Hard X-rays and soft-matter: processing of sol–gel films from a top down route. J Sol-Gel Sci Technol 70, 236–244 (2014). https://doi.org/10.1007/s10971-013-3227-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10971-013-3227-y

Keywords

Search

Navigation