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Hybrid polymer sol–gel material for UV-nanoimprint: microstructure and thermal densification

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Abstract

Hybrid polymer solutions suitable for UV-nanoimprint were synthesized by combination of an alkoxysilane binder mixture with silica nanoparticles. Hydrolysis and condensation reactions were monitored by NMR and viscosity measurements. Thereby long-term stable systems were produced as a prerequisite for industrial application. Dip-coating of glass substrates and subsequent UV-curing yielded thin films. Their thermal densification and microstructural evolution resulted in pure glassy porous coatings, which were in detail characterized by N2-sorption measurements and ellipsometric porosimetry. Results emphasize the importance of the binder-particle interaction within these materials that are destined for the fabrication of microstructured surfaces by cost efficient and industrially feasible UV-based soft lithography. Structured glassy layers with high inorganic content show thermal stability up to >500 °C and have a high structure accuracy >85 %.

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Acknowledgments

This work was funded by the SCHOTT foundation. The authors would like to thank T. Sweeck, A. Schmitt and C. Stolz for experimental support and performing measurements. We thank Fraunhofer ISE for kind support with the master structures.

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Authors and Affiliations

  1. Schott AG, Research and Technology Development, Mainz, Germany

    Franziska Back, Matthias Bockmeyer & Eveline Rudigier-Voigt

  2. Fraunhofer Institut für Silicatforschung ISC, Würzburg, Germany

    Franziska Back & Peer Löbmann

Authors
  1. Franziska Back
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  2. Matthias Bockmeyer
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  3. Eveline Rudigier-Voigt
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  4. Peer Löbmann
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Correspondence to Franziska Back.

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Back, F., Bockmeyer, M., Rudigier-Voigt, E. et al. Hybrid polymer sol–gel material for UV-nanoimprint: microstructure and thermal densification. J Sol-Gel Sci Technol 66, 73–83 (2013). https://doi.org/10.1007/s10971-013-2969-x

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  • DOI: https://doi.org/10.1007/s10971-013-2969-x

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