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Fabrication of micro-lens arrays built in photosensitive hybrid films by UV-cured imprinting technique

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Abstract

Photosensitive TiO2-contained organic–inorganic hybrid films were prepared by combining a low-temperature sol–gel process with a spin-coating technique. Optical properties and photochemical activities of the as-prepared hybrid sol–gel films were characterized by prism coupling technique, thermal gravimetric analysis, UV–Visible spectroscopy, and Fourier transform infrared spectroscopy. Advantages for fabrication of micro-lens arrays based on the as-prepared photosensitive hybrid films were demonstrated by a direct-contact lithography technique and a reflow technique, followed by an UV-cured imprinting technique. Results indicate that the as-prepared photosensitive hybrid materials have great applicability for the fabrication of photonic components. Micro-sphere lens arrays and micro-ellipsoid lens arrays with the diameter from 20 to 100 μm and built in the as-prepared hybrid films were obtained. Morphological and surface profile properties of the as-fabricated micro-lens arrays were characterized by scanning electron microscopy and surface profiler, respectively. Results indicate that the fabrication process of the micro-lens arrays is a simple, cost-effective and mass production process, and the as-prepared photosensitive hybrid materials have great potential applications for the fabrication of the micro-optical elements.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China under Grant No. 61078058, the Ministry of Science and Technology of China through 863-project under grant No. 2009AA03Z218, and the Major Program of the National Natural Science Foundation of China under grant no. 90923012.

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Authors and Affiliations

  1. Electronic Materials Research Laboratory, School of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an, 710049, Shaanxi, People’s Republic of China

    X. H. Zhang, Wenxiu Que, C. Y. Jia & J. X. Hu

  2. Micro-optoelectronic Systems Laboratories, Xi’an Technological University, Xi’an, 710032, Shaanxi, People’s Republic of China

    W. G. Liu

Authors
  1. X. H. Zhang
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  2. Wenxiu Que
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  3. C. Y. Jia
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  4. J. X. Hu
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  5. W. G. Liu
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Correspondence to Wenxiu Que.

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Zhang, X.H., Que, W., Jia, C.Y. et al. Fabrication of micro-lens arrays built in photosensitive hybrid films by UV-cured imprinting technique. J Sol-Gel Sci Technol 60, 71–80 (2011). https://doi.org/10.1007/s10971-011-2552-2

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  • DOI: https://doi.org/10.1007/s10971-011-2552-2

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