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Fabrication of surface-patterned ZnO thin films using sol–gel methods and nanoimprint lithography

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Abstract

Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO sol and subsequent annealing process. The polymer-based ZnO sols were deposited on various substrates for the nanoimprint lithography and converted to surface-patterned ZnO gel films during the thermal curing nanoimprint process. Finally, crystalline ZnO films were obtained by subsequent annealing of the patterned ZnO gel films. The optical characterization indicates that the surface patterning of ZnO thin films can lead to an enhanced transmittance. Large-scale ZnO thin films with different patterns can be fabricated by various easy-made ordered templates using this combination of sol–gel and nanoimprint lithography techniques.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China (Grant No. 20903034, 10874040), the Cultivation Fund of the Key Scientific and Technical Innovation Project, Ministry of Education of China (Grant No. 708062) and Young Backbone Teacher Cultivating Project of Henan University.

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Authors and Affiliations

  1. Key Laboratory for Special Functional Materials of Ministry of Education, Henan University, Kaifeng, 475004, People’s Republic of China

    Shuxi Dai, Yang Wang, Dianbo Zhang, Xiao Han, Qing Shi, Shujie Wang & Zuliang Du

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  1. Shuxi Dai
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  2. Yang Wang
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  3. Dianbo Zhang
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  4. Xiao Han
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  5. Qing Shi
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  6. Shujie Wang
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  7. Zuliang Du
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Correspondence to Zuliang Du.

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Dai, S., Wang, Y., Zhang, D. et al. Fabrication of surface-patterned ZnO thin films using sol–gel methods and nanoimprint lithography. J Sol-Gel Sci Technol 60, 17–22 (2011). https://doi.org/10.1007/s10971-011-2545-1

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  • DOI: https://doi.org/10.1007/s10971-011-2545-1

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