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Deposition of La2Zr2O7 film by chemical solution deposition

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Abstract

La2Zr2O7 (LZO) formation of bulk powders and of films by chemical solution deposition (CSD) process have been studied using propionates. The treatment involved a one step cycle in the reducing forming gas (Ar-5%H2) to be compatible with Ni-5at%W RABITS. Large amount of residual carbon was found in LZO powders formed in these conditions (10 wt%). The volume fraction of the cube texture in LZO films on Ni-5at%W RABITS was found to be a function of the speed of the gas flown above sample. This phenomenon is discussed in considering the C deposited from the carbon-containing gases emitted during the pyrolysis of the precursor. Using proper conditions (950 °C and the speed of gas of 6.8 × 10−2 m/s), LZO films with good surface crystallinity could be obtained on Ni-5at%W RABITS as demonstrated by X-ray diffraction, electron backscattered diffraction and RHEED. The existence of residual carbon in oxide films is a common question to films deposited by CSD processes under reducing condition.

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Acknowledgments

This work was supported by the French embassy in Beijing and the International Laboratory for the Applications of Superconductor and Magnetic Materials (LAS2M-CNRS-NIN). It was also supported by the National High Technology Research and Development Program of China (863 Program) under contracts Nos. 2006AA03Z204 and 2008AA03Z202, and French ANR-Madisup project. Drs L. Ortega and C. Jimenez (respectively, at Néel Institut and LMGP) are acknowledged for many helpful discussions. Drs De Sousa Meneses and B. Rousseau at CEMTHI (Orléans-France) are acknowledged for thickness measurements by IR reflectometry.

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Correspondence to P. Odier.

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Yu, Z.M., Odier, P., Morlens, S. et al. Deposition of La2Zr2O7 film by chemical solution deposition. J Sol-Gel Sci Technol 54, 363–370 (2010). https://doi.org/10.1007/s10971-010-2204-y

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