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Study on parylene/SiO2 composite films for protection of KDP crystals

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Abstract

In this paper, parylene/SiO2 composite films were reported to protect KDP crystals, indispensable cells in ICF experiments, from moisture. FTIR, UV-NIR spectra and XPS were used to analyze the properties of films. Laser damage threshold of films was also measured. With porous silica coating on surface of parylene film, the transmittance of dual layers can be raised to more than 91%. KDP crystals with poly(p-xylylene)/SiO2 coating could work well in ambient atmosphere for more than half a year.

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References

  1. Rhodes MA, De Yoreo JJ, Woods BW, Atherton LJ (1993) ICF annual report of Lawrence Livermore National Laboratory, UCRL-LR-105820-92 (1993, 23)

  2. Nakatsuka Masahiro, Fujioka Kana, Kanabe Tadashi et al (1997) Rapid growth over 50 mm/day of water soluble KDP crystal. J Crystal Growth 171:531–537

    Article  CAS  Google Scholar 

  3. Beach WF, Lee C, Basset DR, Austin TM, Olson R (1989) Xylylene polymers, encyclopedia of polymer science and engineering, vol 7, 2nd edn. Wiley, New York, pp 990–1023

  4. Maier G (2001) Mater Today September–October 22–33

  5. Yang X, Grosjean C, Tay YC (1998) Solid-state sensor and actuator workshop, Hilton Head Island, SC, 7–11 June 1998, Transducers Research Foundation

  6. Wu G, Wang J, Shen J et al (2000) A novel route to control refractive index of sol–gel derived nano-porous silica films used as broadband antireflective coatings. Mater Sci Eng B78:135–139

    Article  CAS  Google Scholar 

  7. Yang G-R, Ganguli S (1998) High depostion rate parylene films. J Crystal growth 183:385–390

    Article  CAS  Google Scholar 

  8. Fortin JB, Lu T-M (2001) Ultraviolet radiation induced degradation of poly-para-xylylene(parylene) thin films. Thin Solid Films 397:223–228

    Article  CAS  Google Scholar 

  9. Fortin JB, Lu TM (2002) A model for the chemical vapor deposition of poly(para-xylylene) (parylene) thin films. Chem Mater 14:1945–1949

    Article  CAS  Google Scholar 

  10. Bera M, Rivaton A, Gandon C, Gardette JL (2000) Photooxidation of poly(para-xylylene). Eur Polymer J 36:1753–1764

    Article  CAS  Google Scholar 

  11. Guangming W, Jue W, Jun S et al (2001) A new method to control nano-porous structure of sol-gel-derived silica films and their properties. Mater Res Bull 36:2127–2139

    Article  Google Scholar 

Download references

Acknowledgments

The authors gratefully acknowledge the Natural Science Foundation of China (No. 20133040), the National 863 program of High technology (2002AA842052) for their financial support.

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Correspondence to Xu Chao.

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Chao, X., Jun, S., Bin, Z. et al. Study on parylene/SiO2 composite films for protection of KDP crystals. J Sol-Gel Sci Technol 45, 319–324 (2008). https://doi.org/10.1007/s10971-008-1679-2

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  • DOI: https://doi.org/10.1007/s10971-008-1679-2

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