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The sol-gel route of TEOS ozonation

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Abstract

A new solvent-less sol-gel route for silica film elaboration is presented. TEOS polymerization is induced by ozone bubbling through the initial sol composed of TEOS and water with the molar ratio R = [H2O]/[Si]. Replacing ozone by pure oxygen allows for demonstrating the specific effects of ozone. With ozone bubbling, a comparison of certain film properties is made between R = 0 and R = 5 with HCl aqueous solution (pH = 1.8). The opto-geometrical properties of the films are studied by spectroscopic ellipsometry, the surface topography by atomic force microscopy and the chemical content by infra-red spectroscopy. The huge influence of the R value on sol and film properties is shown.

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Authors and Affiliations

  1. Laboratoire de Physique de la Matière Condensée et Nanostructures, UMR CNRS 5586, Université Claude Bernard LYON 1 et CNRS, Domaine Scientifique de la Doua, 69622, Villeurbanne Cedex, France

    R. Brenier

  2. Laboratoire d'Electronique, d'Optoélectronique et Microsystèmes, UMR 5512, Ecole Centrale de Lyon, 36, Avenue Guy de Collongue, BP 163, 69131, Ecully, France

    A. Gagnaire

Authors
  1. R. Brenier
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  2. A. Gagnaire
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Correspondence to R. Brenier.

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Brenier, R., Gagnaire, A. The sol-gel route of TEOS ozonation. J Sol-Gel Sci Technol 38, 37–46 (2006). https://doi.org/10.1007/s10971-006-6089-8

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  • DOI: https://doi.org/10.1007/s10971-006-6089-8

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