Preparation of Titanium Oxide Layer on Silica Glass Substrate with Titanium Naphthenate Precursor
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Nanocrystalline TiO2 thin films on silica glass substrates were prepared by using a naphthenic acid precursor. As-deposited thin films were heat treated at 500, 600, 700 and 800∘C for 30 min in air. The TiO2 thin films were analyzed by High Resolution X-ray diffraction, ultra violet—visible—near infrared spectrophotometer, field emission—scanning electron microscope and scanning probe microscope. After annealing at 600 and 700∘C, the XRD patterns consist of only anatase peaks of TiO2 film. Rutile(110) peak begins to appear at an annealing temperature of 800∘C. Relative high transmittance at visible range was obtained for all films except the film annealed at 800∘C. Optical band gap, Eg, is in the range between 3.53 and 3.78 eV except the TiO2 film annealed at 500∘C. The best hydrophilicity was achieved with a high-temperature annealing.
Keywordsnanocrystalline TiO2 film annatase rutile transmittance
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