Deposition of metals and metal oxides on plastic foils
- 225 Downloads
Self-supporting layers of metal and metal oxides are the most desirable form of targets and films for heavy-ion applications. If the self-supporting film cannot be produced in the wanted size or thickness, then typically a thin, self-supporting carbon backing is employed. But nevertheless there are applications where carbon as a backing does not offer the optimal properties as a backing. Then very often plastic backings are wanted. Several plastics are available commercially as a standard backing with very good quality and homogeneity. We report on the deposition of metals and metal oxides on various backings, when a standard commercial alternative is not available.
KeywordsCoating Magnetron sputtering Metal on plastic Metal oxide on plastic
Many thanks to Gabi Otto, GSI, for the photo enclosed as Fig. 1.