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Direct Laser Writing of Microscale 3D Structures: Morphological and Mechanical Properties

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Journal of Russian Laser Research Aims and scope

Abstract

Microscale 3D structure realization nowadays is possible due to the direct laser writing (DLW)-photolithography. The DLW-photolithography technology provides a unique way to fabricate X-ray lenses with arbitrary shape and curvature radius less than 10 μm. However, an achievement of mechanically stable lithographic features is in demand for the fabrication of microoptical elements with high curvature values including X-ray lenses. According to this purpose, the research based on novel and promising methacrylate-containing material photocomposition for the DLW-photolithography is carried out. Improved solubility (1%wt) provides a large fabrication window, so it increases opportunities for use in the DLW-photolithography. A comprehensive study of the mechanical and morphological properties of the photocomposition makes it possible to determine the optimum DLW-photolithography parameters to fabricate mechanically-stable compound-refractive-lens (CRL) element. We use experimental methods of nanoindentation, confocal microscopy, and atomic force microscopy (AFM). The saturation value of reduced Young’s modulus equal to 2.00±0.20 GPa is reached at a laser power of 5 mW and at a speed of 180 μm/s.

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Authors and Affiliations

  1. Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, Dolgoprudny, Moscow Region, 141700, Russia

    Denis A. Shcherbakov, Danila A. Kolymagin, Rilond P. Matital, Dmytro A. Chubich, Ekaterina V. Gladkikh & Alexei G. Vitukhnovsky

  2. Technological Institute of Superhard and New Carbon Materials, Troitsk, Moscow, 108840, Russia

    Ekaterina V. Gladkikh & Alexei S. Useinov

  3. G. A. Razuvaev Institute of Organometallic Chemistry, Russian Academy of Sciences, Tropinin Street 49, Nizhny Novgorod, 603137, Russia

    Maxim V. Arsenyev & Sergey A. Chesnokov

  4. Lebedev Physical Institute, Russian Academy of Sciences, Leninskii Prospect 53, Moscow, 119991, Russia

    Alexei G. Vitukhnovsky

Authors
  1. Denis A. Shcherbakov
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  2. Danila A. Kolymagin
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  3. Rilond P. Matital
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  4. Dmytro A. Chubich
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  5. Ekaterina V. Gladkikh
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  6. Alexei S. Useinov
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  7. Maxim V. Arsenyev
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  8. Sergey A. Chesnokov
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  9. Alexei G. Vitukhnovsky
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Correspondence to Alexei G. Vitukhnovsky.

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Shcherbakov, D.A., Kolymagin, D.A., Matital, R.P. et al. Direct Laser Writing of Microscale 3D Structures: Morphological and Mechanical Properties. J Russ Laser Res 44, 47–55 (2023). https://doi.org/10.1007/s10946-023-10106-0

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  • DOI: https://doi.org/10.1007/s10946-023-10106-0

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