Abstract
Undoped and aluminum-doped ZnO (AZO) thin films were prepared by the sol–gel process. Single thin layers were synthesized at room temperature by spin coating on glass and silicon substrates. The gel was laser irradiated (530 nm, 10 W) during the spinning process. We used Fourier-transform infrared (FTIR) spectroscopy and scanning electron microscopy (SEM) to characterize the chemical bonding configuration and surface morphology. UV–Vis spectroscopy was used to find optical transmittance, and energy-dispersive X-ray spectroscopy (EDS) was used to measure the surface chemical composition. Results of the EDS and FTIR analyses confirmed the successful preparation of ZnO and AZO through laser-assisted spin coating. SEM images showed that surface morphology and porosity were affected by the doping concentration. Al-doped samples showed high transmittance and possessed optical band gap values between 3.26 and 3.34 eV without laser irradiation and 3.3 – 3.341 eV with laser irradiation. Laser irradiation improved the structure and optical properties of the films.
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Ismael, M., Saied, E. & Hassan, Y.M. Laser-Assisted Spin Coating of Al-Doped ZnO thin Films. J Russ Laser Res 41, 149–155 (2020). https://doi.org/10.1007/s10946-020-09860-2
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DOI: https://doi.org/10.1007/s10946-020-09860-2