Abstract
We investigate experimentally laser annealing of oxide films on the sapphire surface at the LIMO 100-532/1064-U facility. The treatment is performed using a Nd:YAG solid-state laser of a fixed wavelength of 1,064 nm. We present the results of morphology studies of iron-oxide film surfaces by atomic force microscopy. We obtain the dependence of the film-surface peak height on the laser irradiation power. We show that a laser irradiation power of the order of 90 W is sufficient for the formation of crystal grains and transition to the polycrystalline structure of the film. We show that, depending on the laser-irradiation parameters, the film-surface quality can be refined due to the recrystallization of amorphous layers.
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Translated from manuscript first submitted on February 3, 2015 and in final form on February 9, 2015.
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Malyukov, S.P., Klunnikova, Y.V. & Sayenko, A.V. Laser Annealing of Oxide Films on the Sapphire Surface. J Russ Laser Res 36, 276–280 (2015). https://doi.org/10.1007/s10946-015-9500-5
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DOI: https://doi.org/10.1007/s10946-015-9500-5