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Deposition of ITO Nanopowder Layers on Flexible Substrate by Spin Coating Using Pulsed Nd-YAG Laser for Crystallization and Bonding

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Abstract

A transparent thin layer of indium–tin oxide (ITO) is coated on polyethylene terephthalate (PET) by a spin coating process. The surface is treated by a pulsed Nd-YAG laser. We investigate the effect of laser treatment on crystallization and bonding processes of the thin layer using atomic force microscope (AFM) and scanning electron microscope (SEM). The best results are obtained when the pulse frequency, duration, and energy were 1000 Hz, 0.2 to 20 ms, and 25 to 40 J, respectively. The results show that the ITO layer coated on a flexible PET substrate is conductive and transparent. The sheet resistance obtained is 0.6 kΩ, and the transparency of a 350-nm layer in the visible range is more than 83.6%. Using the Nd-YAG laser treatment, we increase the conductivity by a factor of 100 times, and higher bonding performances are achieved.

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Authors and Affiliations

  1. Nanocoating Laboratory, Faculty of Chemical Industry, Iranian Research Organization for Science and Technology, Forsat Ave. 71, Englab St., Tehran, I. R. Iran

    H. Salar Amoli & M. Mozaffari

  2. Department of Chemistry, Amirkabir University of Technology, Tehran, I. R. Iran

    H. Amani

Authors
  1. H. Salar Amoli
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  2. H. Amani
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  3. M. Mozaffari
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Correspondence to H. Salar Amoli.

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Amoli, H.S., Amani, H. & Mozaffari, M. Deposition of ITO Nanopowder Layers on Flexible Substrate by Spin Coating Using Pulsed Nd-YAG Laser for Crystallization and Bonding. J Russ Laser Res 34, 581–585 (2013). https://doi.org/10.1007/s10946-013-9390-3

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  • DOI: https://doi.org/10.1007/s10946-013-9390-3

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