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Development of Microwave Kinetic Inductance Detectors for a THz On-Chip Spectrometer

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Abstract

Far-infrared (FIR) wavelength light provides a wealth of information about astrophysical processes. Large field-of-view FIR spectrometers face a variety of challenges that can be bypassed by utilizing on-chip filter bank technology. To this end, we have been developing microwave kinetic inductance detectors (MKIDs) to couple to on-chip spectrometric technologies. We utilize a unique two-silicon wafer design to create a waveguide for an on-chip spectrometer between 1.4 and 2 THz. The spectrometer’s principle of operation is electromagnetic radiation traveling down a center waveguide before being picked off by a resonance cavity and absorbed by a detector. The MKIDs are designed to couple directly to the waveguide using an annular antenna shape for the inductor. Alignment of the two-wafer design is achieved with two dowel pins and a hole and slot pattern in our custom designed box. We present the design and early test data from a 18-channel prototype device. The prototype yielded the full 18 resonances with quality factors \(Q_c\) of about \(5\,\times \,10^4\) and \(Q_i\) of about \(1\,\times \,10^4\). We plan to use the technology we developed to create an \(n \times n\) pixel device targeting \(R=100\).

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References

  1. A. Poglitsch et al., The photodetector array camera and spectrometer (pacs) on the herschel space observatory*. A &A 518, 2 (2010). https://doi.org/10.1051/0004-6361/201014535

    Article  Google Scholar 

  2. M.J. Griffin et al., The herschel-spire instrument and its in-flight performance. A &A 518, 3 (2010). https://doi.org/10.1051/0004-6361/201014519

    Article  Google Scholar 

  3. P.E. Clegg et al., The ISO long-wavelength spectrometer. A &A 315, 38–42 (1996)

    Google Scholar 

  4. S. Hailey-Dunsheath, E. Shirokoff, P.S. Barry, C.M. Bradford, G. Chattopadhyay, P. Day, S. Doyle, M. Hollister, A. Kovacs, H.G. LeDuc, P. Mauskopf, C.M. McKenney, R. Monroe, R. O’Brient, S. Padin, T. Reck, L. Swenson, C.E. Tucker, J. Zmuidzinas, Status of SuperSpec: a broadband, on-chip millimeter-wave spectrometer, in Holland, W.S., Zmuidzinas, J. (eds.) Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VII. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 9153 (2014), p. 91530. https://doi.org/10.1117/12.2057229

  5. K.S. Karkare, P.S. Barry, C.M. Bradford, S. Chapman, S. Doyle, J. Glenn, S. Gordon, S. Hailey-Dunsheath, R.M.J. Janssen, A. Kovács, H.G. LeDuc, P. Mauskopf, R. McGeehan, J. Redford, E. Shirokoff, C. Tucker, J. Wheeler, J. Zmuidzinas, Full-array noise performance of deployment-grade SuperSpec mm-wave on-chip spectrometers. J. Low Temp. Phys. 199(3–4), 849–857 (2020). https://doi.org/10.1007/s10909-020-02407-4. arXiv:2002.04542 [astro-ph.IM]

    Article  ADS  CAS  Google Scholar 

  6. G. Che, S. Bryan, M. Underhill, P. Mauskopf, C. Groppi, G. Jones, B. Johnson, H. McCarrick, D. Flanigan, P. Day, WSPEC: A Waveguide Filter Bank Spectrometer (2015), pp. 1503–06528. https://doi.org/10.48550/arXiv.1503.06528, arXiv:1503.06528 [astro-ph.IM]

  7. P.A. George, C. Manolatou, F. Rana, A.L. Bingham, D.R. Grischkowsky, Integrated waveguide-coupled terahertz microcavity resonators. Appl. Phys. Lett. 91(19), 191122 (2007). https://doi.org/10.1063/1.2809608

    Article  ADS  CAS  Google Scholar 

  8. S. Doyle, P. Mauskopf, J. Naylon, A. Porch, C. Duncombe, Lumped element kinetic inductance detectors, in Proceedings of the Eighteenth International Symposium on Space Terahertz Technology 2007, ISSTT 2007 151 (2008), pp. 530–536. https://doi.org/10.1007/s10909-007-9685-2

  9. R. Nie, J.P. Filippini, E. Brooks, P. Barry, J. Conners, C. Fazar, M. Gradziel, D. Mercado, D. Patru, E. Shirokoff, L. Spencer, S. Tramm, N Trappe, M., Z., A vacuum waveguide filter bank spectrometer for far-infrared spectroscopy. J. Low Temp. Phys. (This Special Issue) (2023)

  10. X. Cheng, R. Huang, J. Xu, X. Xu, Broadband terahertz near-perfect absorbers. ACS Appl. Mater. Interfaces 12(29), 33352–33360 (2020). https://doi.org/10.1021/acsami.0c06162. (PMID: 32526137)

    Article  CAS  PubMed  Google Scholar 

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Acknowledgements

This work is supported by NASA under Grant 80NSSC20K1359, issued through the Astrophysics Research and Analysis (APRA) program of the Science Mission Directorate. E.B. acknowledges support from the National Science Foundation through the Graduate Research Fellowship Program (GRFP) and assistance from K. Karkare during the project and in preparing this proceedings. This work was carried out in part in the Materials Research Laboratory Central Research Facilities (U. Illinois); the Micro-Nano-Mechanical Systems Cleanroom Laboratory (U. Illinois); and the Pritzker Nanofabrication Facility (U. Chicago). The authors sadly note the untimely passing of Dr. Erik Shirokoff, a respected collaborator and key driver of this effort.

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E.B. wrote the main manuscript text and prepared figures. All authors are part of the RAxDEx collaboration and reviewed the manuscript.

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Correspondence to E. Brooks.

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Brooks, E., Barry, P., Nie, R. et al. Development of Microwave Kinetic Inductance Detectors for a THz On-Chip Spectrometer. J Low Temp Phys 214, 230–237 (2024). https://doi.org/10.1007/s10909-023-03043-4

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