Journal of Low Temperature Physics

, Volume 184, Issue 1–2, pp 17–22 | Cite as

Tuning the Transition Temperature of WSi\(_{x}\) Alloys for Use in Cryogenic Microcalorimeters

Article

Abstract

Microwave kinetic inductance detectors (MKID) provide a pathway to highly multiplexed, high-resolution, detectors. Over the past several years we have introduced the concept of the thermal kinetic inductance detector (TKID), which operates as a microcalorimeter. As with other microcalorimeters, the thermal noise of a TKID is reduced when the operating temperature is decreased. However, because the sensitivity of a TKID decreases as the operating temperature drops below 20 % of \(T_\mathrm{C}\), the \(T_\mathrm{C}\) of the resonator material must be tuned to match the desired operating temperature. We have investigated the WSi\(_{x}\) alloy system as a material for these detectors. By co-sputtering from a Si and W\(_{2}\)Si target, we have deposited WSi\(_{x}\) films with a tunable \(T_\mathrm{C}\) that ranges from 5 K down to 500 mK. These films provide a large kinetic inductance fraction and relatively low noise levels. We provide results of these studies showing the \(T_\mathrm{C}\), resistivity, quality factors, and noise as a function of deposition conditions. These results show that WSi\(_{x}\) is a good candidate for TKIDs.

Keywords

Low temperature detector kinetic inductance detector  Materials Tungsten silicide 

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Copyright information

© Springer Science+Business Media New York 2016

Authors and Affiliations

  • T. Cecil
    • 1
  • L. Gades
    • 1
  • T. Madden
    • 1
  • D. Yan
    • 1
    • 2
  • A. Miceli
    • 1
  1. 1.Advanced Photon SourceArgonne National LaboratoryArgonneUSA
  2. 2.Department of Applied PhysicsNorthwestern UniversityEvanstonUSA

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