Journal of Low Temperature Physics

, Volume 184, Issue 1–2, pp 148–153 | Cite as

Development of Sub-micron Broadband Lens-Coupled LEKIDs for Sub-mm Astronomy

  • A. Gomez
  • P. Prieto
  • J. Bueno
  • S. Doyle
  • P. Barry
  • A. Bideaud
  • N. Llombart
  • D. Granados
  • J. L. Costa-Kramer
  • J. Martin-Pintado
  • J. J. A. Baselmans
Article

Abstract

We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.

Keywords

Lumped element Kinetic inductance detector Nanofabrication 

References

  1. 1.
    S. Doyle, P. Mauskopf, J. Naylon, A. Porch, C. Duncombe, J. Low Temp. Phys. 151, 530 (2008). doi:10.1007/s10909-007-9685-2
  2. 2.
    H.G. Leduc, B. Bumble, P.K. Day, B. Ho, Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner. J. Zmuidzinas Appl. Phys. Lett. 97, 102509 (2010). doi:10.1063/1.3480420
  3. 3.
    J. Bueno, P.C.J.J. Coumou, G. Zheng, P.J. de Visser, T.M. Klapwijk, E.F.C. Driessen, S. Doyle, J.J.A. Baselmans, Appl. Phys. Lett. 105, 192601 (2014). doi:10.1063/1.4901536
  4. 4.
    P.D. Mauskopf, S. Doyle, P. Barry, S. Rowe, A. Bidead, P.A.R. Ade, C. Tucker, E. Castillo, A. Monfardini, J. Goupy, M. Calvo, J. Low Temp. Phys. 153, 545 (2014). doi:10.1007/s10909-013-1069-1
  5. 5.
    P.J. de Visser, J.J.A. Baselmans, J. Bueno, N. Llombart, T.M. Klapwijk, Nat. Commun. 5, 3130 (2014). doi:10.1038/ncomms4130
  6. 6.
    B. Blazquez, N. Llombart, D. Cavallo, A. Freni, A. Neto, I.E.E.E. Trans, Antennas Propag. 62, 1624 (2008). doi:10.1109/TAP.2014.2341292
  7. 7.
    S.J.C. Yates, J.J.A. Baselmans, A.M. Baryshev, S. Doyle, A. Endo, L. Ferrari, S. Hochgürtel, B. Klein, Clean beam patterns with low crosstalk using 850 GHz microwave kinetic inductance detectors. J. Low Temp. Phys. 176, 761 (2014). doi:10.1007/s10909-013-1034-z
  8. 8.
    J. Baselmans, S. Yates, P. Diener, P. de Visser, J. Low Temp. Phys. 167, 360 (2012). doi:10.1007/s10909-012-0511-0

Copyright information

© Springer Science+Business Media New York 2016

Authors and Affiliations

  • A. Gomez
    • 1
  • P. Prieto
    • 1
  • J. Bueno
    • 2
  • S. Doyle
    • 3
  • P. Barry
    • 3
  • A. Bideaud
    • 3
  • N. Llombart
    • 4
  • D. Granados
    • 5
  • J. L. Costa-Kramer
    • 6
  • J. Martin-Pintado
    • 1
  • J. J. A. Baselmans
    • 2
  1. 1.Centro de Astrobiología (INTA-CSIC)Torrejon de ArdozSpain
  2. 2.SRON, Netherlands Institute for Space ResearchUtrechtThe Netherlands
  3. 3.Department of Physics and AstronomyCardiff UniversityCardiffUK
  4. 4.Terahertz Sensing Group, Faculty of Electrical EngineeringDelft University of TechnologyDelftThe Netherlands
  5. 5.IMDEA-NanocienciaMadridSpain
  6. 6.Instituto de Microelectronica de Madrid (CSIC)Tres CantosSpain

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