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X-ray Detection Performance of 100-pixel Superconducting Tunnel Junction Array Detector in the Soft X-ray Region

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Abstract

The overall performance of a 100-pixel superconducting tunnel junction (STJ) array detector in the soft X-ray region was determined by measuring fluorescent X-rays from light elements. The yield of working STJs in the fabricated detector was 90%, and the leakage current for these 90 STJs was 11.6±2.5 nA. The STJs had an intrinsic energy resolution for O-Kα X-rays (524.9 eV) of 10.2±1.7 eV (FWHM). The deviation from energy linearity was −0.042±0.45%, 0.793±0.91%, and 0.135±1.31% for O-Kα (524.9 eV), N-Kα (392.4 eV) and B-Kα (183.3 eV) X-rays, respectively. Most of the STJs exhibited uniform X-ray detection characteristics. In addition, the detector could discriminate the N-Kα peak in the fluorescent X-ray spectrum from n-type SiC doped with 300 ppm nitrogen.

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Acknowledgements

The authors thank N. Zen, K. Suzuki, and T. Kitazume for their help with the KEK experiment, and M. Koike for fruitful discussions. This study was supported by the Budget for Nuclear Research of the Ministry of Education, Culture, Sports, Science and Technology.

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Authors and Affiliations

  1. National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8568, Japan

    S. Shiki, M. Ukibe & M. Ohkubo

  2. High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki, 305-8568, Japan

    Y. Kitajima

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  1. S. Shiki
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  2. M. Ukibe
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  3. Y. Kitajima
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  4. M. Ohkubo
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Correspondence to S. Shiki.

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Shiki, S., Ukibe, M., Kitajima, Y. et al. X-ray Detection Performance of 100-pixel Superconducting Tunnel Junction Array Detector in the Soft X-ray Region. J Low Temp Phys 167, 748–753 (2012). https://doi.org/10.1007/s10909-012-0526-6

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  • DOI: https://doi.org/10.1007/s10909-012-0526-6

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