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Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region

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Abstract

A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter-array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 μm×350 μm and 330 μm×330 μm, respectively. The absorber stem of 150 μm×150 μm in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55Fe source.

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Acknowledgements

The authors thank T. Hasuo for technical support. This work was financially supported by SENTAN, Japan Science and Technology Agency (JST).

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Authors and Affiliations

  1. Department of Applied Quantum Physics and Nuclear Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka-shi, Fukuoka, 819-0395, Japan

    K. Maehata, N. Iyomoto, T. Yasumune, M. Maeda & S. Matsumura

  2. National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan

    T. Hara

  3. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS/JAXA), 3-1-1 Yoshinodai, Chuo, Sagamihara, Kanagawa, 252-5210, Japan

    K. Mitsuda & N. Yamasaki

  4. SII NanoTechnology Inc., 36-1 Takenoshita, Oyama-cho, Suntou-gun, Shizuoka, 410-1393, Japan

    K. Tanaka

Authors
  1. K. Maehata
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  2. N. Iyomoto
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  3. T. Yasumune
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  4. M. Maeda
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  5. S. Matsumura
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  6. T. Hara
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  7. K. Mitsuda
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  8. N. Yamasaki
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  9. K. Tanaka
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Corresponding author

Correspondence to K. Maehata.

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Maehata, K., Iyomoto, N., Yasumune, T. et al. Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region. J Low Temp Phys 167, 226–231 (2012). https://doi.org/10.1007/s10909-012-0469-y

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  • DOI: https://doi.org/10.1007/s10909-012-0469-y

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