Journal of Low Temperature Physics

, Volume 151, Issue 1–2, pp 245–248 | Cite as

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

  • Clarence L. Chang
  • John E. Carlstrom
  • Aaron Datesman
  • Stephan S. Meyer
  • Valentyn Novosad
  • Volodymyr G. Yefremenko
  • Tom Crawford
  • Tom Downes
  • Jeff McMahon
  • Kathryn Miknaitis
  • Joaquin D. Vieira
Article

Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

Keywords

Bolometers TES Polarization 

PACS

07.57.Kp 95.55.Rg 95.75.Hi 

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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Clarence L. Chang
    • 1
  • John E. Carlstrom
    • 1
  • Aaron Datesman
    • 2
  • Stephan S. Meyer
    • 1
  • Valentyn Novosad
    • 2
  • Volodymyr G. Yefremenko
    • 2
  • Tom Crawford
    • 1
  • Tom Downes
    • 1
  • Jeff McMahon
    • 1
  • Kathryn Miknaitis
    • 1
  • Joaquin D. Vieira
    • 1
  1. 1.Kavli Institute for Cosmological PhysicsUniversity of ChicagoChicagoUSA
  2. 2.Material Sciences DivisionArgonne National LaboratoryArgonneUSA

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