Properties of thin coatings formed on polymer and glass substrates by plasma-enhanced chemical vapor deposition from a mixture of nitrogen with acetylene at atmospheric pressure were investigated. It was established that chemically stable transparent films with a mass ratio of fixed carbon and nitrogen C:N ~ 2:1 are formed on the surface of these substrates. When the deposition time was increased, arrays of dendrite-like structures were formed on the substrates.
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Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 89, No. 2, pp. 457–463, March–April, 2016.
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Plevako, F.V., Gorbatov, S.V., Davidovich, P.A. et al. Deposition of Functional Coatings from an Acetylene-Containing Plasma at Atmospheric Pressure. J Eng Phys Thermophy 89, 471–477 (2016). https://doi.org/10.1007/s10891-016-1398-4
- high-frequency barrier gaseous discharge
- polymerization in plasma
- thin-film coating
- dendrite-like structures