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Influence of diffusion on the cleaning of the CVD reactor atmosphere

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Journal of Engineering Physics and Thermophysics Aims and scope

The problem of displacement of a gas impurity from a cylindrical reactor by a laminar flow is solved numerically. Engineering equations for calculating the time of displacement are obtained. The results of the work can be applied in developing the technology of producing carbon tubes by the CVD method and in closely related problems.

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Correspondence to S. P. Fisenko.

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Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 85, No. 4, pp. 731–734, July–August, 2012.

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Stankevich, Y.A., Fisenko, S.P. Influence of diffusion on the cleaning of the CVD reactor atmosphere. J Eng Phys Thermophy 85, 794–797 (2012). https://doi.org/10.1007/s10891-012-0716-8

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  • DOI: https://doi.org/10.1007/s10891-012-0716-8

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