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Experience in depositing carbon coatings by the gas-jet method

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Journal of Engineering Physics and Thermophysics Aims and scope

The gas-jet deposition of carbon and diamond-like films on a substrate with precursor gas activation by a hot wire mesh has been studied experimentally. Several designs of the wire activator for depositing films from a gaseous mixture of CH4, H2, and Ar have been tested. The carbon structure of obtained films was determined by Raman spectroscopy.

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Authors and Affiliations

  1. Institute of Semiconductor Physics, Siberian branch of the Russian Academy of Sciences, 13 Lavrent’ev Ave., Novosibirsk, 630090, Russia

    V. A. Volodin

  2. Institute of Thermal Physics, Siberian branch of the Russian Academy of Sciences, 1 Lavrent’ev Ave., Novosibirsk, 630090, Russia

    A. A. Emel’yanov, A. K. Rebrov, N. I. Timoshenko & I. B. Yudin

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  1. V. A. Volodin
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  2. A. A. Emel’yanov
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  3. A. K. Rebrov
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  4. N. I. Timoshenko
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  5. I. B. Yudin
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Correspondence to I. B. Yudin.

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Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 85, No. 1, pp. 93–101, January–February, 2012.

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Volodin, V.A., Emel’yanov, A.A., Rebrov, A.K. et al. Experience in depositing carbon coatings by the gas-jet method. J Eng Phys Thermophy 85, 101–109 (2012). https://doi.org/10.1007/s10891-012-0626-9

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  • DOI: https://doi.org/10.1007/s10891-012-0626-9

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