Abstract
The piezoelectric-based accelerometer gains popularity due to its capability to produce direct electrical output. In this work, two new meander architecture-based high-performance piezoelectric accelerometers have been proposed and their performance characteristics are extensively analyzed. The meander-based accelerometers are designed using PiezoMUMPs fabrication technology which uses 0.5 \(\mu\)m AlN piezo layer. The designed structures are having overall area of 1.08 mm \(\times\) 1.8 mm and 1.96 mm \(\times\) 1.8 mm with voltage sensitivity of 3.92 V/g and 1.8 V/g, respectively, in resonant region. The proposed meander architecture utilizes low volume and exhibits improved dynamic characteristics in terms of higher voltage sensitivity, lower-resonant frequencies, and better structural stability with respect to reported literature. Further, the energy-harvesting aspects for these meander-based structures have been explored, and the harvested power of the proposed structure is higher than the conventional structure.
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Acknowledgements
The authors would like to acknowledge Science and Engineering Research Board, DST, Govt. of India for funding support to this work. We also acknowledge IIT Kharagpur for finite-element analysis simulation facility.
Funding
This work is funded by Science and Engineering Research Board (SERB), DST, Govt. of India under the sanction number ECR/2017/000543 to Dr. Banibrata Mukherjee.
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All the authors contributed the idea, technical concept, methodology, and design of proposed sensor. Simulation and mathematical analysis were done by PB. The manuscript was reviewed by SKK and BM. All authors read and approved the manuscript.
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Biswal, P., Kumar, M., Kar, S.K. et al. High-sensitivity and low-volume-based piezoelectric MEMS acceleration sensor using PiezoMUMPs. J Mater Sci: Mater Electron 34, 2162 (2023). https://doi.org/10.1007/s10854-023-11528-x
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DOI: https://doi.org/10.1007/s10854-023-11528-x