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Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD

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Abstract

The electro-optical properties of films (HMDSO/ O2) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index n, dielectric permittivity ε, extinction and absorption coefficients using of numerical commercial software “CODE”. The analysis of the latter made using classic models such as Cauchy, Drude-Lorentz and Tauc. These allow the determination of optical constants such as the plasma frequency, the ratio of carrier density/effective mass the optical conductivity. Finally, the infrared analysis by Fourier transfer allowed understanding the structural changes that help to understand the optical behavior.

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The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

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Authors and Affiliations

  1. Laboratoire de Matériaux Avancés Et Phénomènes Quantiques, Faculté Des Sciences de Tunis, Université de Tunis El Manar, Campus Universitaire, 1068, Tunis, Tunisie

    R. Amri, Z. Ben Hamed, D. Gamra & H. Bouchriha

  2. Laboratoire de Physique de La Matière Condensée, Université de Picardie Jules Verne, UFR Des Sciences, 33 Rue Saint-Leu, 80039, Amiens Cedex, France

    R. Amri & M. Lejeune

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Amri, R., Hamed, Z.B., Gamra, D. et al. Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD. J Mater Sci: Mater Electron 34, 1413 (2023). https://doi.org/10.1007/s10854-023-10749-4

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