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A temperature-stable Pd nanofilm hydrogen sensor with a Wheatstone bridge structure

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Abstract

The performances of most hydrogen sensors are influenced by temperature. To reduce the influences of ambient temperature on the output response, a Pd nanofilm hydrogen sensor with a Wheatstone bridge structure was designed and fabricated by micro-electro-mechanical system (MEMS) technology. The voltage was used as the output response signal for data gathering. The performance of the Pd nanofilm sensor with a Wheatstone bridge structure was investigated. The Pd nanofilm hydrogen sensor exhibited a stable output response to hydrogen in the low concentration range within the test temperature range of 30 to 50 °C. The sensor consists of four palladium resistors, two of which have their surfaces covered by SiNx, so that they can compensate for changes in Pd resistance due to variations in ambient temperature, thus increasing the stability of the sensor. Delta Uout of the sensor increased from 7.3 mV to 18.87 mV for hydrogen concentrations from 100 ppm to 800 ppm at 30 °C. The Pd nanofilm sensor exhibited high cycling stability in 8 cycles of measurement. In selective measurements of several reducing gases, the sensor responded to hydrogen only.

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Funding

The authors declare that no funds, grants, or other support were received during the preparation of this manuscript.

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Authors and Affiliations

  1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China

    Yunyu Dai, Hongchuan Jiang, Xiaohui Zhao, Jiawei Tian, Xinwu Deng & Wanli Zhang

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  1. Yunyu Dai
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  2. Hongchuan Jiang
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  3. Xiaohui Zhao
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  4. Jiawei Tian
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  5. Xinwu Deng
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  6. Wanli Zhang
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Contributions

All authors contributed to the study conception and design. HJ: guided all the experimental design and led the manuscript revision work. YD: did most of the experiments, data analysis and the draft manuscript prepared. JT, XZ, XD and WZ: participated in some experiments. All authors commented on previous versions of the manuscript and all authors read and approved the final manuscript.

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Correspondence to Hongchuan Jiang.

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Dai, Y., Jiang, H., Zhao, X. et al. A temperature-stable Pd nanofilm hydrogen sensor with a Wheatstone bridge structure. J Mater Sci: Mater Electron 34, 833 (2023). https://doi.org/10.1007/s10854-023-10219-x

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  • DOI: https://doi.org/10.1007/s10854-023-10219-x

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