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A review of nanoindentation and related cathodoluminescence studies on semiconductor materials

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Abstract

Nanoindentation studies on bulk and epitaxial semiconductor crystals have been reviewed in general. The common materials of technological interest such as Si, Ge, GaAs, GaN, InP, CdZnTe, HgCdTe etc. have been included. Issues related with the measurement and analysis of load–displacement characteristics have been discussed in detail, including those for cyclic nanoindentation and continuous stiffness measurements. Common mistakes/oversights in the extraction of mechanical properties, particularly for the elastic modulus, have been highlighted. Various features observed in load–displacement curves are discussed in connection with different semiconductor materials. These include pop-in/pop-out events and serrations observed in general, and the open-jaw and hysteresis like features in cyclic nanoindentation. Cathodoluminescence studies on indented surfaces have also been included to highlight the deformation behaviour of some of the crystalline semiconductor materials.

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Data availability

The datasets generated during and/or analysed during the current study are available from the corresponding author on reasonable request.

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Acknowledgements

The authors thank Director, Solid State Physics Laboratory, Delhi for permitting to publication this work. The authors greatly acknowledge the contribution of Dr. A. K. Kapoor and Mr. Anand Kumar in providing CL images of the CdZnTe single crystals presented here.

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No funding was received for conducting this study.

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Authors and Affiliations

  1. Solid State Physics Laboratory, Lucknow Road, Timarpur, Delhi, India

    Hemant Kumar Sharma & Raghvendra Sahai Saxena

  2. Indian Institute of Technology, Hauz Khas, New Delhi, India

    Rajesh Kumar Sharma & Rajesh Prasad

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  1. Hemant Kumar Sharma
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  2. Rajesh Kumar Sharma
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  3. Raghvendra Sahai Saxena
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  4. Rajesh Prasad
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Contributions

All authors contributed in the understanding of concepts and data analysis of reported result. The First draft was prepared by HKS and all authors provided their valuable feedback and suggested corrections. RKS and RP has helped to analysing the results of CL and pressure-induced phase transformation. RSS has helped in performing mathematical analysis.

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Correspondence to Hemant Kumar Sharma.

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Sharma, H.K., Sharma, R.K., Saxena, R.S. et al. A review of nanoindentation and related cathodoluminescence studies on semiconductor materials. J Mater Sci: Mater Electron 33, 21223–21245 (2022). https://doi.org/10.1007/s10854-022-08995-z

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  • DOI: https://doi.org/10.1007/s10854-022-08995-z

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