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Laser synthesis of hybrid Fe/Cr 2D structures based on their oxides for thermo-sensors with high sensitivity

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Abstract

Semiconductors are considered promising materials for the fabrication of new thermo-sensors. The photons generated by a KrF laser source (λ = 248 nm, τFWHM ≤ 25 ns) at a fluency of 3.5, 4.5 or 5.5 J/cm2 were used for the synthesis of hybrid Fe/Cr 2D structures via the reaction of ablated iron and chromium atoms from combined target Fe/Cr with oxygen molecules (O2) by reactive pulsed laser deposition (RPLD) process. Hybrid Fe/Cr 2D structures of (50–130) nm thickness were deposited on 293, 500 or 800 K <100> Si substrates in O2 atmosphere of 0.1, 0.5 and 5.0 Pa. GIXD (grazing incident X-ray diffraction) analysis evidenced either amorphous or polycrystalline structures of the deposits. Element analysis was carried out by energy dispersive X-ray spectroscopy (EDXS). Semiconductor temperature trend was detected with variable energy band gap (Eg) in the range of (0.34–1.20) eV depending on the substrate temperature, O2 pressure, hybrid Fe/Cr 2D structure thickness and laser fluencies for atoms’ ablation. The optimum conditions corresponding to the highest thermo-sensitivity (Seebeck coefficient) were reached. The highest obtained Seebeck coefficient of these 2D structures was high as 13 mV/K in the range of (290–340) K. An interpretation for such high thermo-sensitivity was provided. Therefore, these thermo-sensors are exceptionally strong candidates operating at moderate temperature.

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Data availability

The datasets generated during and analysed during the current study are available from the corresponding author on reasonable request. Datasets that are assigned digital object identifiers are cited in the reference list.

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Acknowledgements

N.Stefan and S.A.Mulenko express of gratitude to the support of National Academy of Sciences of Ukraine and Romanian Academy in the frame of the theme “Synthesis of nanometric structures and heterostructures for sensors and energy converters”. N.Stefan acknowledges to the support of Romania National Authority for Research and Innovation (UEFISCDI) under Nucleus Contract No 16N/PN 19 15 01 01/2019-2022. S.A.Mulenko and other authors acknowledge to the support of National Academy of Sciences of Ukraine for the theme No.0118U000416 and The State Financed Program “Support for the development of priority area of scientific research” KPKVK No. 6541230-3A.

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Authors and Affiliations

  1. G.V. Kurdyumov Institute for Metal Physics NAS of Ukraine, 36, Academician Vernadsky Blvd., UA-03142, Kyiv, Ukraine

    S. A. Mulenko & M. A. Skoryk

  2. National Institute for Lasers, Plasma and Radiation Physics, PO Box MG-54, RO-77125, Magurele, Romania

    N. Stefan

  3. Institute for Microdevices NAS of Ukraine, 3, Severo-Syretskaya, UA-04136, Kyiv, Ukraine

    V. M. Popov

  4. V.F. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, Nauky Ave., UA-03028, Kyiv, Ukraine

    A. B. Smirnov & O. Yo. Gudymenko

Authors
  1. S. A. Mulenko
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  2. N. Stefan
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  3. M. A. Skoryk
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  4. V. M. Popov
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  5. A. B. Smirnov
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  6. O. Yo. Gudymenko
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Contributions

All authors contributed to the study conception and design. Material preparation, data collection and analysis were performed by S.A. Mulenko, N. Stefan, A.B. Smirnov, and GIXD, SEM analysis, film thickness measurements for hybrid Fe/Cr 2D structures were performed by O.Yo. Gudymenko, M.A. Skoryk, V.M. Popov. The first draft of the manuscript was written by S.A. Mulenko, A.B. Smirnov, V.M. Popov and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript. The authors declare that no fund, grant or other support were received during the preparation of this manuscript. There are no conflicts of interest. All authors contributed equally to this work.

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Correspondence to S. A. Mulenko.

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Mulenko, S.A., Stefan, N., Skoryk, M.A. et al. Laser synthesis of hybrid Fe/Cr 2D structures based on their oxides for thermo-sensors with high sensitivity. J Mater Sci: Mater Electron 33, 21258–21269 (2022). https://doi.org/10.1007/s10854-022-08850-1

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