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Highly transparent oxide-based ultraviolet photodetectors for flexible electronics

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Abstract

Flexible ultraviolet (UV) photodetectors have attracted great interests for applications in portable and wearable optoelectronic systems. In this work, highly visible-transparent and flexible UV photodetectors based on nanocrystalline zinc oxide (ZnO) films were developed on polyimide substrates by utilizing radio frequency magnetron sputtering and shadow mask deposition. The crystallinity and surface morphology of the ZnO films have been optimized at the substrate temperature of 200 °C. The flexible photodetector exhibited an average transmittance over 85% in the visible spectral range and a large photo-to-dark current ratio of 1.2 × 104 under 360 nm UV illumination. Moreover, the detector demonstrated enhanced photoresponse performance with the rise and decay time of 3.24 s and 108.7 ms, respectively. The highest detectivity of the device reached 2.7 × 1011 cm Hz1/2/W at 5 V bias voltage under an UV illumination intensity of 0.38 mW/cm2. The realization of transparent oxide films-based UV photodetectors on flexible substrates provides potential to develop high-performance and large-scale wearable optoelectronic devices.

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Data availability

The data that support the findings of this study are available from the corresponding author, [Y. Li], upon reasonable request.

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Acknowledgements

This work was supported by the Research Project of Shenzhen Science and Technology Innovation Committee (Grant No. JCYJ20180306170801080). The authors would like to thank Instrument Analysis Center of Xi’an Jiaotong University for the film properties characterization. The authors would also like to thank Mr. Xuan Zhu for the film samples preparation.

Funding

This work was supported by the Research Project of Shenzhen Science and Technology Innovation Committee (Grant No. JCYJ20180306170801080).

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Authors and Affiliations

  1. Shenzhen Academy of Xi’an Jiaotong University, Shenzhen, 518057, Guangdong, China

    Yuanjie Li

  2. Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an, 710049, Shaanxi, China

    Yuanjie Li, Wenbo Hu & Yuqing Zhao

  3. State Key Laboratory for Mechanical Behavior, School of Materials Science and Engineering, Xi’an Jiaotong University, Xi’an, 710049, Shaanxi, China

    Hailong Ma

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  1. Yuanjie Li
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Contributions

YL contributed significantly to data analysis and wrote the manuscript, HM contributed to the data collection and discussions in the manuscript, WH contributed to constructive discussions, and YZ helped with constructive discussions.

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Correspondence to Yuanjie Li.

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Li, Y., Ma, H., Hu, W. et al. Highly transparent oxide-based ultraviolet photodetectors for flexible electronics. J Mater Sci: Mater Electron 33, 15546–15553 (2022). https://doi.org/10.1007/s10854-022-08460-x

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  • DOI: https://doi.org/10.1007/s10854-022-08460-x

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