Skip to main content
SpringerLink
Log in

Effect of oxidation behavior on visible–infrared property of TiN films

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

TiN films were oxidized at different temperatures (300, 400, 500, and 600 °C) for different times (1, 10, 50, and100 h), and the effect of oxidation behavior on optical performance and infrared emissivity of TiN films was investigated. The results showed that TiN films were oxidized to the solid solution of TiON with the same crystal structure as TiN at 400 °C for 1 h. The films exhibited low reflectance and transmittance and the infrared emissivity changed little. With the extension of oxidation time, TiON gradually transformed into Ti2O3 and TiO2 and the infrared emissivity of the films went up. As the oxidation temperature rose above 500 °C, TiN films were oxidized quickly and the infrared emissivity increased to 0.8.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

Data availability

All data generated or analyzed during this study are included in this published article.

References

  1. D.Q. Liu, H.F. Cheng, X. Xing, C.Y. Zhang, W.W. Zheng, Infrared Phys. Technol. 77, 339 (2016)

    Article  CAS  Google Scholar 

  2. F.P. Lang, H. Wang, S.J. Zhang, J.B. Liu, H. Yan, Int. J. Thermophys. 39, 6 (2018)

    Article  Google Scholar 

  3. Z.Y. Ren, L.P. Chen, X.M. Liu, G.J. Li, K. Wang, Q. Wang, Infrared Phys. Technol. 111, 103472 (2020)

    Article  CAS  Google Scholar 

  4. G.L. Zhao, T.B. Zhang, T. Zhang, J.X. Wang, G.R. Han, J. Non-Cryst, Solids 354, 1272 (2008)

    CAS  Google Scholar 

  5. L.L. Lu, F. Luo, Z.B. Huang, W.C. Zhou, D.M. Zhu, Infrared Phys. Technol. 88, 144 (2018)

    Article  CAS  Google Scholar 

  6. M.R. Hantehzadeh, R. Bavadi, A.H. Sari, M. Ghoranneviss, J. Fusion Energ. 30, 333 (2011)

    Article  CAS  Google Scholar 

  7. T.C. Guo, G.Y. Xu, S.J. Tan, Z.H. Yang, H.H. Bu, G. Fang, H.L. Hou, J. Li, J. Alloy. Comp. 804, 503 (2019)

    Article  CAS  Google Scholar 

  8. C. Hu, G.Y. Xu, X.M. Shen, C.M. Shao, X.X. Yan, Appl. Surf. Sci. 256, 3459 (2010)

    Article  CAS  Google Scholar 

  9. Y.C. Chim, X.Z. Ding, X.T. Zeng, S. Zhang, Thin Solid Films 517, 4845 (2009)

    Article  CAS  Google Scholar 

  10. B. Avasarala, P. Haldar, Electrochim. Acta. 55, 9024 (2010)

    Article  CAS  Google Scholar 

  11. H.J. Zhao, P.B. Mi, F.X. Ye, Mater. Chem. Phys. 217, 445 (2018)

    Article  CAS  Google Scholar 

  12. I. Asempah, L.H. Yu, H.B. Ju, D. Yu, J.H. Xu, R. Miao, Surf. Eng. 35, 661 (2019)

    Article  CAS  Google Scholar 

  13. F. Esaka, K. Furuya, H. Shimada, M. Imamura, N. Matsubayashi, H. Sato, A. Nishijima, A. Kawana, H. Ichimura, T. Kikuchi, J. Vac. Sci. Technol. A. 15, 2521 (1997)

    Article  CAS  Google Scholar 

  14. M. Wittmer, J. Noser, H. Melchior, J. appl. phys. 52, 6659 (1981)

    Article  CAS  Google Scholar 

  15. M. Radecka, E. Pamula, A. Trenczek-Zajac, K. Zakrzewska, A. Brudnik, E. Kusior, N.T.H. Kim-Ngan, A.G. Balogh, Solid State Ionics 192, 693 (2011)

    Article  CAS  Google Scholar 

  16. H.L. Liang, J. Xu, D.Y. Zhou, X. Sun, S.C. Chu, Y.Z. Bai, Ceram. Int. 42, 2642 (2016)

    Article  CAS  Google Scholar 

  17. S.K. Mishra, R. Kumar, M. Sreemany, L.C. Pathak, J. Mater. Eng. Perform. 24, 5013 (2015)

    Article  CAS  Google Scholar 

  18. C.N. Kirchner, K.H. Hallmeier, R. Szargan, T. Raschke, C. Radehaus, G. Wittstock, Electroanal. 19, 1023 (2007)

    Article  CAS  Google Scholar 

  19. Z. Lin, K. Liu, Y.C. Zhang, X.J. Yue, G.Q. Song, D.C. Ba, Mater. Sci. Eng. B. 156, 79 (2009)

    Article  CAS  Google Scholar 

  20. V. Tiron, I.L. Velicu, M. Dobromir, A. Demeter, F. Samoila, C. Ursu, L. Sirghi, Thin Solid Films 603, 255 (2016)

    Article  CAS  Google Scholar 

  21. C. Gebauer, P. Fischer, M. Wassner, T. Diemant, Z. Jusys, N. Husing, R.J. Behm, Nano Energy 29, 136 (2016)

    Article  CAS  Google Scholar 

  22. T. Jwad, M. Walker, S. Dimov, Appl. Surf. Sci. 458, 849 (2018)

    Article  CAS  Google Scholar 

  23. P. Osiceanu, Appl. Surf. Sci. 253, 381 (2006)

    Article  CAS  Google Scholar 

  24. A. Glaser, S. Surnev, F.P. Netzer, N. Fateh, G.A. Fontalvo, C. Mitterer, Surf. Sci. 601, 1153 (2007)

    Article  CAS  Google Scholar 

  25. J.K. Yao, J.D. Shao, H.B. He, Z.X. Fan, Vacuum 81, 1023 (2007)

    Article  CAS  Google Scholar 

  26. A. Mumtaz, W.H. Class, J. Vac. Sci. Technol. 20, 345 (1982)

    Article  CAS  Google Scholar 

  27. N. Kumar, J.T. Mcginn, K. Pourrezaei, B. Lee, E.C. Douglas, J. Vac. Sci. Technol. A 6, 1602 (1988)

    Article  CAS  Google Scholar 

  28. H. Sedghi-Ghamchi, A. Hassanzadeh, M. Talebian, H. Mahmoodi-Chenari, Physica B 389, 329 (2007)

    Article  CAS  Google Scholar 

  29. S.K. Rawal, A.K. Chawla, R. Jayaganthan, R. Chandra, Structural. J. Mater. Sci. Technol. 28, 512 (2012)

    Article  CAS  Google Scholar 

  30. D.M. Zhu, K. Li, F. Luo, W.C. Zhou, Appl. Surf. Sci. 255, 6145 (2009)

    Article  CAS  Google Scholar 

Download references

Acknowledgements

This work was supported by the Scientific Research Program Funded by Education Department of Shaanxi Province (No. 20JK0650) and Shaanxi Provincial Science and Technology Department (No. 2020JQ-827).

Author information

Authors and Affiliations

  1. School of Materials Science & Engineering, Xi’an Polytechnic University, Xi’an, 710048, China

    Linlin Lu, Jie Xu, Yi Liu & Xiaolei Su

  2. School of Textile Science and Engineering, Xi’an Polytechnic University, Xi’an, 710048, China

    Jie Dong

  3. State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi’an, 710072, China

    Fa Luo

Authors
  1. Linlin Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jie Xu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yi Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Jie Dong
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Xiaolei Su
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Fa Luo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to Linlin Lu or Jie Xu.

Ethics declarations

Conflict of interest

The authors declare no conflict of interest.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lu, L., Xu, J., Liu, Y. et al. Effect of oxidation behavior on visible–infrared property of TiN films. J Mater Sci: Mater Electron 33, 3267–3274 (2022). https://doi.org/10.1007/s10854-021-07527-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-021-07527-5

Search

Navigation