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Facile fabrication method and decent humidity sensing of anodised nanotubular Ta2O5 on Ta foil substrate

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Abstract

In this study, nanotubular structures were prepared on tantalum film via anodisation using an organic-based electrolyte. Nanotubular tantalum pentoxide (Ta2O5) was synthesised at 30 and 60 min and fabricated as a humidity sensor. The significant growth of anodised nanotubular Ta2O5 has increased the number of pore structures and offered more water absorption active sites for humidity sensing detection. Both anodised samples were annealed to transform an amorphous structure to a cubic crystal structure, where the presence of more crystalline peaks was justified by the XRD spectra. The formation of pore size was proven by FESEM images and the density of pore distribution of the 60-min sensor was higher than the 30-min sensor with a diameter of 10–50 nm and 15–20 nm, respectively. Both fabricated sensors were tested for humidity detection in the range of 40–90% humidity level. Based on the results obtained, the 60-min sensor operated at 10 V possessed the highest sensitivity, low hysteresis, and improved stability compared to the 30-min sensor operated at the same bias voltage. Thus, this paper has elucidated the relationship of anodising time during nanostructure construction towards the variation of current output in humidity sensing due to the availability of oxygen vacancies and active sites as an effort to improve humidity sensing.

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Data availability

The datasets generated during and/or analysed during the current study are available from the corresponding author on reasonable request.

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Funding

This work is supported by the Ministry of Education Malaysia (MOE) under the Fundamental Research Grant Scheme (FRGS) [Grant No. 600-IRMI/FRGS 5/3 (389/2019)].

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Authors and Affiliations

  1. School of Mechanical Engineering, College of Engineering, Universiti Teknologi MARA, 40450, Shah Alam, Selangor, Malaysia

    Nur Lili Suraya Ngadiman, Rozina Abdul Rani, Siti Rabizah Makhsin & Muhammad Azmi Ayub

  2. INTEC Education College, Jalan Senangin Satu 17/2a, Seksyen 17, 40200, Shah Alam, Selangor, Malaysia

    Mahzaton Aqma Abu Talip

  3. NANO-ElecTronic Centre (NET), School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA, 40450, Shah Alam, Selangor, Malaysia

    Ahmad Sabirin Zoolfakar

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  1. Nur Lili Suraya Ngadiman
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  2. Rozina Abdul Rani
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  3. Siti Rabizah Makhsin
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  4. Muhammad Azmi Ayub
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  5. Mahzaton Aqma Abu Talip
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  6. Ahmad Sabirin Zoolfakar
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Contributions

NLSN performed the experiments and analysed the data and wrote the manuscript. RAR helped to analyse the data, contributed to the final version of the manuscript, supervised the project, and is in charge of overall direction and planning. SRM and MAA helped to supervise the project. MAAT contributed to sample preparation. ASZ contributed to the design and implementation of the experiment.

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Correspondence to Rozina Abdul Rani.

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Ngadiman, N.L.S., Abdul Rani, R., Makhsin, S.R. et al. Facile fabrication method and decent humidity sensing of anodised nanotubular Ta2O5 on Ta foil substrate. J Mater Sci: Mater Electron 33, 3065–3080 (2022). https://doi.org/10.1007/s10854-021-07509-7

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