Abstract
Fe3O4, as a half-metallic ferrimagnetic material, is believed to be one of the most promising materials in spin transport for spintronics. However, fabricating stoichiometric Fe3O4 film is still challenging because the oxidation is hard to control for various preparing methods. In this paper, series of Fe3O4 thin films on Si (100) substrates are grown by sputtering from a Fe3O4 target without oxygen atmosphere at different growth temperature and then extra heat treatment in high vacuum. By combining X-ray diffractometer (XRD), Raman spectrum, X-ray photoelectron spectroscopy and X-ray magnetic circular dichroism, VSM analysis, we see that the structure and magnetic moment of Fe3O4 film are not only related with growth temperature during sputtering, but also refer to the temperature of post-heat treatments. When the growth temperature is lower than 300 °C, the film does not show any XRD diffraction peaks. When the growth temperature increases from 300 to 500 °C, the film shows the (111) texture of Fe3O4 film clearly. However, the other XRD diffraction peaks are observed after post-heat treatment. The saturation magnetization increases with growth temperature and the largest saturation magnetization is 473 emu/cm3 for growth temperature of 450 °C and extra heat treatment, which is close to bulk Fe3O4. Our results suggest that a selectable method can be used to fabricate high magnetic moment of Fe3O4 thin film.
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References
S. Datta, B. Das, Electronic analog of the electro-optic modulator. Appl. Phys. Lett. 56(7), 665–667 (1990)
V.N. Antonov, B.N. Harmon, Electronic structure and x-ray magnetic circular dichroism in Fe3O4 and Mn-, Co-, or Ni-substituted Fe3O4. Phys. Rev. B. 67, 024417 (2003)
R. Ramos, T. Kikkawa, K. Uchida, H. Adachi, I. Lucas, M.H. Aguirre, P. Algarabel, L. Morellón, S. Maekawa, E. Saitoh, M.R. Ibarra, Observation of the spin seebeck effect in epitaxial Fe3O4 thin films. Appl. Phys. Lett. 102(7), 072413 (2013)
B. Dieny, Giant magnetoresistance in spin-valve multilayers. J. Magn. Magn. Mater. 136(3), 335–359 (1994)
A. Fernández-Pacheco, J.M. De Teresa, J. Orna, L. Morellon, P.A. Algarabel, J.A. Pardo, M.R. Ibarra, Universal scaling of the anomalous Hall effect in Fe3O4 epitaxial thin films. Phys. Rev. B. 77, 100403(R) (2008)
J. Wu, S. Xu, Y. Zhu, Helicobacter pylori CagA: a critical destroyer of the gastric epithelial barrier. Dig. Dis. Sci. 58(7), 1830–1837 (2013)
D. Tripathy, A.O. Adeyeye, Effect of spacer layer thickness on the magnetic and magnetotransport properties of Fe3O4/Cu/Ni80Fe20 spin valve structures. Phys. Rev. B. 75, 012403 (2007)
Z. Szotek, W.M. Temmerman, A. Svane, L. Petit, G.M. Stocks, H. Winter, Ab initio study of charge order in Fe3O4. Phys. Rev. B. 68, 055415 (2003)
T. Nagahama, Y. Matsuda, K. Tate, T. Kawai, N. Takahashi, S. Hiratani, Y. Watanabe, T. Yanase, T. Shimada, Magnetic properties of epitaxial Fe3O4 films with various crystal orientations and tunnel magnetoresistance effect at room temperature. Appl. Phys. Lett. 105(10), 102410 (2014)
Z. Huang, Q. Chen, Y. Zhai, J. Wang, Y. Xu, B. Wang, Oxygen vacancy induced magnetization switching in Fe3O4 epitaxial ultrathin films on GaAs (100). Appl. Phys. Lett. 106(18), 182401 (2015)
Z. Huang, Y. Zhai, X. Lu, G.D. Li, P.K.J. Wong, Y.B. Xu, H.R. Zhai, The interface effect of the magnetic anisotropy in ultrathin epitaxial Fe3O4 film. Appl. Phys. Lett. 92(11), 113105 (2008)
J. Zhang, W. Liu, M. Zhang, X. Zhang, W. Niu, M. Gao, X. Wang, J. Du, R. Zhang, Y. Xu, Oxygen pressure-tuned epitaxy and magnetic properties of magnetite thin films. J. Magn. Magn. Mater. 432, 472–476 (2017)
E. Liu, Z. Huang, J.G. Zheng, J. Yue, L. Chen, X. Wu, Y. Sui, Y. Zhai, S. Tang, J. Du, H. Zhai, Texture Induced Magnetic Anisotropy in Fe3O4 Films. Appl. Phys. Lett. 107(17), 172403 (2015)
S.A. Chambers, Epitaxial growth and properties of thin film oxides. Surf. Sci. Rep. 39, 105–180 (2000)
D. Kumar, K. Pandya, S. Chaudhary, Electric field assisted sputtering of Fe3O4 thin films and reduction in anti-phase boundaries. J. Appl. Phys. 112, 073909 (2019)
C. Park, Y. Peng, J.-G. Zhu, D.E. Laughlin, R.M. White, Magnetoresistance of polycrystalline Fe3O4 films prepared by reactive sputtering at room temperature. J. Appl. Phys. 97, 10C303 (2005)
H. Liu, E.Y. Jiang, H.L. Bai, R.K. Zheng, H.L. Wei, X.X. Zhang, Large room-temperature spin-dependent tunneling magnetoresistance in polycrystalline Fe3O4 films. Appl. Phys. Lett. 83, 3531 (2003)
Z.L. Lu, M.X. Xu, W.Q. Zou, S. Wang, X.C. Liu, Y.B. Lin, J.P. Xu, Z.H. Lu, J.F. Wang, L.Y. Lv, F.M. Zhang, Y.W. Du, Large low field magnetoresistance in ultrathin nanocrystalline magnetite Fe3O4 films at room temperature. Appl. Phys. Lett. 91, 102508 (2007)
C. Boothman, A.M. Sánchez, S. van Dijken, Structural, magnetic, and transport properties of Fe3O4/Si(111) and Fe3O4/Si(001). J. Appl. Phys. 101, 123903 (2007)
P.V. Muhammed Shameem, L. Mekala, D. Singh, M.S. Kumar, Structural and magnetic properties of polycrystalline Fe3O4 thin film. AIP Conf. Proc. 1728, 020333 (2016)
I. Chamritski, G. Burns, Infrared and raman-active phonons of magnetite, maghemite, and hematite: a computer simulation and spectroscopic study. J. Phys. Chem. B 109(11), 4965–4968 (2005)
E. Liu, Y. Yin, L. Sun, Y. Zhai, J. Du, F. Xu, H. Zhai, Increasing spin polarization in Fe3O4 films by engineering antiphase boundary densities. Appl. Phys. Lett. 110, 142402 (2017)
T. Yamashita, P. Hayes, Analysis of XPS spectra of Fe2+ and Fe3+ ions in oxide materials. Appl. Surf. Sci. 254(8), 2441–2449 (2008)
X.F. Meng, Y.L. Xu, X.F. Sun, J. Wang, L.L. Xiong, X.F. Du, S.C. Mao, Graphene oxide sheets-induced growth of nanostructured Fe3O4 for high-performance anode material of lithium ion batteries. J. Mater. Chem. A 3, 12938 (2015)
Y. Ding, B.Q. Miao, Y. Zhao, F.M. Li, Y.C. Jiang, S.N. Li, Y. Chen, Direct growth of holey Fe3O4-coupled Ni(OH)2 sheets on nickel foam for the oxygen evolution reaction. Chin. J. Catal. 42(2), 271–278 (2021)
W. Zhang, P.K.J. Wong, D. Zhang, J. Yue, Z. Kou, G. van der Laan, A. Scholl, J.-G. Zheng, Z. Lu, Y. Zhai, XMCD and XMCD-PEEM studies on magnetic-field-assisted self-Assembled 1D nanochains of spherical ferrite particles. Adv. Funct. Mater. 27(29), 1701265 (2017)
W. Zhang, P.K.J. Wong, X. Zhou, A. Rath, Z. Huang, H. Wang, S.A. Morton, J. Yuan, L. Zhang, R. Chua, S. Zeng, E. Liu, F. Xu, A. Ariando, D.H.C. Chua, Y.P. Feng, G. van der Laan, S.J. Pennycook, Y. Zhai, A.T.S. Wee, Ferromagnet/two-dimensional semiconducting transition-metal dichalcogenide interface with perpendicular magnetic anisotropy. ACS Nano 13, 2253–2261 (2019)
H. Yuan, E. Liu, Y. Yin, W. Zhang, P.K.J. Wong, J.G. Zheng, Z. Huang, H. Ou, Y. Zhai, Q. Xu, J. Du, H. Zhai, Enhancement of magnetic moment in ZnxFe3−xO4 thin films with dilute Zn substitution. Appl. Phys. Lett. 108(23), 232403 (2016)
F.C. Voogt, T. Fujii, P.J.M. Smulders, L. Niesen, M.A. James, T. Hibma, NO2-assisted molecular-beam epitaxy of Fe3O4, Fe3-δO4, and γ-Fe2O3 thin films on MgO(100). Phys. Rev. B. 60, 15 (1999)
G.Q. Gong, A. Gupta, G. Xiao, W. Qian, V.P. Dravid, Magnetoresistance and magnetic properties of epitaxial magnetite thin films. Phys. Rev. B. 56, 5096 (1997)
F.E.N. Ramirez, J.A. Souza, The non-adiabatic polaron model revisited. Braz. J. Phys. 44, 308 (2014)
X.H. Liu, W. Liu, Z.D. Zhang, Evolution of magnetic properties in the vicinity of the Verwey transition in Fe3O4 thin films. Phys. Rev. B. 96, 094405 (2017)
M. Ziese, H.J. Blythe, Magnetoresistance of magnetite. J. Phys. Condens. Matter 12, 13 (2000)
R. Ramos, S.K. Arora, I.V. Shvets, Anomalous anisotropic magnetoresistance in epitaxial Fe3O4 thin films on MgO(001). Phys. Rev. B. 78, 214402 (2008)
P. Li, L.T. Zhang, W.B. Mi, E.Y. Jiang, H.L. Bai, Origin of the butterfly-shaped magnetoresistance in reactive sputtered epitaxial Fe3O4 films. J. App. Phys. 106, 033908 (2009)
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We acknowledge financial support by National Natural Science Foundation of China (Nos. 52071079, 51971109, 51771053).
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Cao, L., Guo, Q., Liang, J. et al. Preparation of sputtered Fe3O4 thin film. J Mater Sci: Mater Electron 32, 23645–23653 (2021). https://doi.org/10.1007/s10854-021-06858-7
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DOI: https://doi.org/10.1007/s10854-021-06858-7