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The Ci(SiI)n defect in neutron-irradiated silicon

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Abstract

We report experimental results in neutron-irradiated silicon containing carbon. Initially, carbon interstitial (Ci) defects form and readily associate with self-interstitials in the course of irradiation leading to the production of Ci(SiI) defects and upon annealing to the sequential formation of Ci(SiI)n complexes. Infrared spectroscopy measurements report the detection of two localized vibrational bands at 953 and 960 cm−1 related to the Ci(SiI) defect. The thermal stability and annealing kinetics of the defect are discussed. The decay out of the two bands occurs in the temperature range of 130–200 °C. They follow second-order kinetics with an activation energy of 0.93 eV. No other bands were detected to grow in the spectra upon their annealing. Density functional theory calculations were used to investigate the structure and the energetics of the Ci(SiI) and the Ci(SiI)2 defects.

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References

  1. W.W. Moses, Nucl. Instr. Methods Phys. Res. A 610, 11 (2009)

    Article  CAS  Google Scholar 

  2. L.C. Andreani, A. Bozzola, P. Kowalczewski, M. Liscidini, L. Redorici, Adv. Phys. 4, 1548305 (2018)

    Google Scholar 

  3. A.H. Atabaki, S. Moazeni, F. Pavanello, H. Gevorgyan, J. Notaros, L. Alloatti, M.T. Wade, C. Sun, S.A. Kruger, H. Meng, K. Al Qubaisi, I. Wang, B. Zhang, A. Khilo, C.V. Baiocco, M.A. Popović, V.M. Stojanović, R.J. Ram, Nature 556, 349 (2018)

    Article  CAS  Google Scholar 

  4. G. Lindstrom, Nucl. Instr. Methods Phys. Res. A 512, 30 (2003)

    Article  CAS  Google Scholar 

  5. H.-W. Hubers, S.G. Pavlov, V.N. Shastin, Semicond. Sci. Technol. 20, S211 (2005)

    Article  CAS  Google Scholar 

  6. R.C. Newman, in Defects in Silicon II, vol. 91-9, ed. by W.M. Bullis, U. Gosele, F. Shimura (Proceedings, 1991), p. 271

  7. D. Tsuchiγa, K. Sueoka, H. Yamamoto, Phys. State Solidi A (2019). https://doi.org/10.1002/pssa.201800615

    Article  Google Scholar 

  8. C.A. Londos, A. Andrianakis, Ε.Ν. Sgourou, V.V. Emtsev, H. Oyama, J. Appl. Phys. 109, 033508 (2011)

    Article  CAS  Google Scholar 

  9. E. Simoen, S.K. Dhayalan, A. Hikavyy, R. Loo, E. Rosseel, H. Vrielinck, J. Lauwaert, ECS J. Solid State Sci. Technol. 6, P284 (2017)

    Article  CAS  Google Scholar 

  10. H. Wang, A. Chroneos, E.N. Sgourou, C.A. Londos, U. Schwingenschlogl, Sci. Rep. 4, 4909 (2014)

    Article  CAS  Google Scholar 

  11. A. Chroeos, E.N. Sgourou, C.A. Londos, U. Schwingenschlogl, Appl. Phys. Rev. 2, 021306 (2015)

    Article  CAS  Google Scholar 

  12. C.A. Londos, Physica Status Solidi 92, 609 (1985)

    Article  CAS  Google Scholar 

  13. C.A. Londos, Semicond. Sci. Technol. 5, 645 (1990)

    Article  CAS  Google Scholar 

  14. F. Zirkelbach, B. Stritzker, K. Nordlund, J.K.N. Lindner, W.G. Schmidt, E. Rauls, Phys. Rev. B 84, 064126 (2011)

    Article  CAS  Google Scholar 

  15. E. Simoen, S.K. Dhayalan, A. Hikavyy, R. Loo, E. Rosseel, H. Vrielinck, J. Lauwaert, ECS J. Solid State Sci. Technol. 6, P284 (2017)

    Article  CAS  Google Scholar 

  16. G. Davies, Mater. Sci. Forum 38–41, 151 (1989)

    Google Scholar 

  17. A. Matoni, F. Bernadini, L. Colombo, Phys. Rev. B 66, 195214 (2002)

    Article  CAS  Google Scholar 

  18. B.C. MacEvoy, S.I. Watts, Solid State Phenom. 57–58, 221 (1997)

    Article  Google Scholar 

  19. R. Pinacho, P. Castrillo, M. Jaraiz, I. Martin-Bragado, J. Bartolla, H.-J. Gossmann, G.-H. Gilmer, I.-L. Benton, J. Appl. Phys. 92, 1582 (2002)

    Article  CAS  Google Scholar 

  20. A.E. Michael, W. Rausch, P.A. Ronsheim, R.H. Kastl, Appl. Phys. Lett. 50, 416 (1987)

    Article  Google Scholar 

  21. K.S. Jones, J. Liu, L. Zhang, V. Krishnamurtly, R.T. DeHoff, Nucl. Instum. Methods Phys. Res. B 106, 227 (1995)

    Article  CAS  Google Scholar 

  22. S. Lee, G.S. Hwang, Phys. Rev. B 78, 045204 (2008)

    Article  CAS  Google Scholar 

  23. S.S. Kapur, T. Sinno, Phys. Rev. B 82, 045205 (2010)

    Article  CAS  Google Scholar 

  24. S.S. Kapur, M. Prasad, T. Sinno, Phys. Rev. B 69, 155214 (2004)

    Article  CAS  Google Scholar 

  25. C.A. Londos, D.N. Aliprantis, G. Antonaras, M.S. Potsidi, T. Angeletos, J. Appl. Phys. 123, 145702 (2018)

    Article  CAS  Google Scholar 

  26. S.-R.G. Christopoulos, E.N. Sgourou, R.V. Vovk, A. Chroneos, C.A. Londos, Solid State Commun. 263, 19 (2017)

    Article  CAS  Google Scholar 

  27. M.S. Potsidi, C.A. Londos, J. Appl. Phys. 100, 033523 (2006)

    Article  CAS  Google Scholar 

  28. S.-R.G. Christopoulos, E.N. Sgourou, R.V. Vovk, A. Chroneos, C.A. Londos, Materials 11, 612 (2018)

    Article  CAS  Google Scholar 

  29. G. Davies and R.C. Newman, in Handbook of Semiconductors, vol. 3, ed. by S. Mahajan (Elsevier, Amsterdam, 1994), p. 1557–1635

  30. C.A. Londos, M.S. Potsidi, E. Stakakis, Phys. B 340–342, 551 (2003)

    Article  CAS  Google Scholar 

  31. S.P. Chappell, R.C. Newman, Semicond. Sci. Technol. 2, 691 (1987)

    Article  CAS  Google Scholar 

  32. M.C. Payne, M.P. Teter, D.C. Allan, T.A. Arias, J.D. Joannopoulos, Rev. Mod. Phys. 64, 1045 (1992)

    Article  CAS  Google Scholar 

  33. M.D. Segall, P.J.D. Lindan, M.J. Probert, C.J. Pickard, P.J. Hasnip, S.J. Clark, M.C. Payne, J. Phys. 14, 2717 (2002)

    CAS  Google Scholar 

  34. J. Perdew, K. Burke, M. Ernzerhof, Phys. Rev. Lett. 77, 3865 (1996)

    Article  CAS  Google Scholar 

  35. D. Vanderbilt, Phys. Rev. B 41, 7892 (1990)

    Article  CAS  Google Scholar 

  36. H.J. Monkhorst, J.D. Pack, Phys. Rev. B 13, 5188 (1976)

    Article  Google Scholar 

  37. A. Chroneos, C.A. Londos, J. Appl. Phys. 107, 093518 (2010)

    Article  CAS  Google Scholar 

  38. A. Chroneos, C.A. Londos, E.N. Sgourou, P. Pochet, Appl. Phys. Lett. 99, 241901 (2011)

    Article  CAS  Google Scholar 

  39. E.N. Sgourou, D. Timerkaeva, C.A. Londos, D. Aliprantis, A. Chroneos, D. Caliste, P. Pochet, J. Appl. Phys. 113, 113506 (2013)

    Article  CAS  Google Scholar 

  40. H. Wang, A. Chroneos, C.A. Londos, E.N. Sgourou, U. Schwingenschlögl, Appl. Phys. Lett. 103, 052101 (2013)

    Article  CAS  Google Scholar 

  41. J. Bourgoin, M. Lannoo, Point Defects in Semiconductors II Experimental Aspects (Springer, Berlin, 1983). ISBN-13:978-3-642-81834-9

  42. S. Ishino, F. Nakazawa, R. Hasiguti, J. Phys. Chem. Solids 24, 1033 (1963)

    Article  CAS  Google Scholar 

  43. P.W. Atkins, Physical Chemistry (Oxford University Press, Oxford, 1994)

    Google Scholar 

  44. K.J. Laidler, Chemical Kinetics (Harper & Row, New York, 1987)

    Google Scholar 

  45. R. Radu, I. Pintilie, L.F. Makarenko, E. Fretwurst, G. Lindstroem, J. Appl. Phys. 123, 161402 (2018)

    Article  CAS  Google Scholar 

  46. E. Grow, F. Davis, M. Maxfield, Statistical Manual (Dover, New York, 1960), pp. 157–158

    Google Scholar 

  47. R.C. Newman, R. Jones, in Semiconductors and Semimetals, vol. 42, ed. by F. Shimura (Academic Press San Diego, 1994), p. 289

  48. H. Stein, in the 2nd Internat. Conf. Neutron Transmutation Doping in Semiconductors, ed. by J. Meese (Plenum Press, New York, 1979) p. 229

  49. R.C. Newman, Rep. Prog. Phys. 45, 1163 (1982)

    Article  Google Scholar 

  50. D.H.J. Totterdell, R.C. Newman, J. Phys. C 8, 589 (1975)

    Article  CAS  Google Scholar 

  51. J. Adey, J.P. Goss, R. Jones, P.R. Briddon, Phys. Rev. B 67, 245325 (2003)

    Article  CAS  Google Scholar 

  52. P. Varotsos, Solid State Ionics 179, 438–441 (2008)

    Article  CAS  Google Scholar 

  53. A. Chroneos, H. Bracht, R.W. Grimes, B.P. Uberuaga, Mater. Sci. Eng., B 154–155, 72–75 (2008)

    Article  CAS  Google Scholar 

  54. A. Chroneos, R.V. Vovk, Solid State Ionics 274, 1–3 (2015)

    Article  CAS  Google Scholar 

  55. D.C. Parfitt, M.W.D. Cooper, M.J.D. Rushton, S.-R.G. Christopoulos, M.E. Fitzpatrick, A. Chroneos, RSC Adv. 6, 74018–74027 (2016)

    Article  CAS  Google Scholar 

  56. N.V. Sarlis, E.S. Skordas, Solid State Ionics 335, 82–85 (2019)

    Article  CAS  Google Scholar 

Download references

Acknowledgements

T. Angeletos is grateful to the A. S. Onassis Foundation for financial support though his Ph.D. scholarship (Grant No. G ZL 001-1/2015-2016).

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Londos, C.A., Christopoulos, SR.G., Chroneos, A. et al. The Ci(SiI)n defect in neutron-irradiated silicon. J Mater Sci: Mater Electron 31, 930–934 (2020). https://doi.org/10.1007/s10854-019-02602-4

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