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NO2 gas sensing properties of Pd/WO3 films prepared by glancing angle deposition

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Abstract

The fabrication procedure of gas sensing films deposited by physical vapor deposition is more compatible with the micro-electro-mechanical system (MEMS) process. However, low sensitivity and high working temperature of gas sensing films limit their application. In this work, tungsten trioxide (WO3) films were deposited on silicon oxide by glancing angle deposition (GLAD), and palladium (Pd) was deposited onto the WO3 layer. Then, the morphology, structure, and nitrogen dioxide (NO2) gas sensing properties of the Pd/WO3 films were studied. The results show that the Pd/WO3 films may comprise discrete Pd islands and columnar WO3 nanorods. The nanostructure can detect 0.5 ppm NO2 at 150 °C with a sensitivity of 1.85 and possesses good selectivity, which can be mainly attributed to large specific surface area of nanorods, catalysis of Pd, and Schottky barrier between Pd and WO3. Therefore, the Pd/WO3 nanostructure prepared by GLAD has great potential in the field of NO2 MEMS sensors.

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Authors and Affiliations

  1. State Key Laboratory of Advanced Materials for Smart Sensing, General Research Institute for Non-ferrous Metals, Beijing, 101407, People’s Republic of China

    Hao Liu, Yaohua Xu, Xiao Zhang, Wenrui Zhao, Anjie Ming & Feng Wei

Authors
  1. Hao Liu
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  2. Yaohua Xu
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  3. Xiao Zhang
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  4. Wenrui Zhao
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  5. Anjie Ming
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  6. Feng Wei
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Correspondence to Hao Liu.

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Liu, H., Xu, Y., Zhang, X. et al. NO2 gas sensing properties of Pd/WO3 films prepared by glancing angle deposition. J Mater Sci: Mater Electron 31, 5827–5832 (2020). https://doi.org/10.1007/s10854-019-02585-2

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  • DOI: https://doi.org/10.1007/s10854-019-02585-2

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