Abstract
High performance free-standing multilayer PNN–PZN–PZT thick films have been successfully fabricated by tape-casting and one step co-fired method. Optimal formulation of slurries has been found. Free-standing multilayer thick films with Ag electrodes were obtained after co-fired at 900 °C. With proper pretreatment, compact structure and well combined PZT layers can be obtained, which indicates the tightly integrated structure of multilayer thick films. Diffusion and permeation between Ag electrodes and PZT layers was not observed in specimens sintered at 900 °C. The influences of organic content and sintering temperature on density and crystallinity were discussed. Nine layered specimens showed great electrical properties: d33, tanδ, ε33T/ε0, g33 and Pr of 1880 pC N−1, 2.3%, 1067, 199.00 mV m/N, 82.77 µC cm−2. The displacement of nine layers specimens under same applied voltage was increased from 901 to 8489 nm compared with bulk ceramics. Those outstanding properties indicate that co-fired free-standing PNN–PZN–PZT multilayer thick films are suitable for application in MEMS system, energy harvesting device and piezoelectric power generation.
Similar content being viewed by others
References
H.S. Han, E.C. Park, J.S. Lee et al., Trans. Electr. Electron. Mater. 12, 249–252 (2011)
L.C. Hoffman, Am. Ceram. Soc. Bull. 63, 572–576 (1984)
X. Ren, H. Fan, Y. Zhao et al., ACS Appl. Mater. Interfaces 8, 26190–26197 (2016)
M. Wang, W. Ma, N. Chen et al., Mater. Lett. 152, 17–20 (2015)
X. Liu, S. Xue, F. Li et al., J. Mater. Chem. C. 6, 814–822 (2018)
J. Shi, H. Fan, X. Liu et al., J. Eur. Ceram. Soc. 34, 3675–3683 (2014)
J.J. Choi, J.H. Lee, B.D. Hahn et al., Mater. Res. Bull. 43, 483–490 (2008)
R. Gao, X. Chu, Y. Huan et al., Phys. Status Solidi A 211, 2378–2383 (2015)
M. Wang, W. Ma, C. Peng et al., Mater Lett. 159, 68–71 (2015)
G. Han, J. Ryu, W.H. Yoon et al., Mater. Lett. 65, 2193–2196 (2015)
H. Hyoung-Su, Y.J. Il, A.K. Kwan, Trans. Electr. Electron. Mater. 12, 249–252 (2011)
S.S. Vadla, A.R. Kulkarni, V. Narayanan, Int J Appl Ceram Tec. 12, 139–145 (2016)
G.T.A. Kovacs, Micromachined Transducers Sourcebook (McGraw-Hill, New York, 2000)
E.S. Thiele, D. Damjanovic, N.J. Setter, Am. Ceram. Soc. 84, 2863–2868 (2001)
M. Wagner, A. Roosen, H. Oostra et al., J. Electroceram. 14, 231–238 (2005)
C.W. Ahn, J.J. Choi, J. Ryu et al., Mater. Lett. 141, 323–326 (2015)
H. Kim, S. Priya, H. Stephanou et al., IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54, 1851–1859 (2007)
R.A. Dorey, R.W. Whatmore, J. Electroceram. 12, 19–32 (2004)
V.Q. Nguyen, J.K. Kang, H.S. Han et al., Sens. Actuators A 200, 107–113 (2013)
J. Shi, H. Fan, X. Liu et al., J. Mater. Sci.-Mater. Electron. 26, 9409–9413 (2015)
L. Chen, H. Fan, S. Zhang, J. Am. Ceram. Soc. 100, 3568–3576 (2017)
N.R. Harris, M. Hill, R. Torah et al., Sens. Actuators A 132, 311–316 (2006)
B. Hu, H. Fan, L. Ning et al., Ceram. Int. (2018). https://doi.org/10.1016/j.ceramint.2018.03.176
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Gao, J., Ma, W., Yang, Y. et al. The free-standing multilayer thick films of 0.7Pb(Zr0.46Ti0.54)O3–0.1Pb(Zn1/3Nb2/3)O3–0.2Pb(Ni1/3Nb2/3)O3 with low co-fired temperature. J Mater Sci: Mater Electron 29, 11664–11671 (2018). https://doi.org/10.1007/s10854-018-9263-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-018-9263-1