Skip to main content
SpringerLink
Log in

Nano-structured WO3 layers sensitized with ALD Pt for quick detection of H2S

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

WO3 nano-structured layers on top of micro-hotplates were formed by sol–gel deposition technique and electrochemical anodic etching of thin tungsten layers. Both types of gas sensing layers were activated by drop coated Pt nano-particles and alternatively, by atomic layer deposited (ALD) Pt. Due to the limited number of ALD cycles the Pt layer is not a contiguous but composed of uniformly distributed nano-particles of 2–3 nm size. Devices were characterized by their responses for exposure of H2S and NH3. Investigation of sensitivity, selectivity and device dynamics revealed that the ALD sensitized, electrochemically formed porous WO3 layer is suitable for quick detection of H2S.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. L. Huang, T. Liu, H. Zhang, W. Guo, W. Zeng, Hydrothermal synthesis of different TiO2 nanostructures: structure, growth and gas sensor properties. J. Mater. Sci. Mater. Electron. 23, 2024–2029 (2012)

    Article  Google Scholar 

  2. C. Wang, L. Yin, L. Zhang, Y. Qi, N. Lun, N. Liu, N. Yamazoe, K. Shimanoe, Large scale synthesis and gas-sensing properties of anatase TiO2 three-dimensional hierarchical. Langmuir 26(15), 12841–12848 (2010)

    Article  Google Scholar 

  3. M.W. Ahn, K.S. Park, J.H. Heo, J.G. Park, D.W. Kim, K.J. Choi, J.H. Lee, S.H. Hong, Gas sensing properties of defect-controlled ZnO-nanowire gas sensor. Appl. Phys. Lett. 93, 263103 (2008)

    Article  Google Scholar 

  4. L. Mädler, A. Roessler, S.E. Pratsinis, T. Sahm, A. Gurlo, N. Barsan, U. Weimar, Direct formation of highly porous gas-sensing films by in situ thermophoretic deposition of flame-made Pt/SnO2 nanoparticles. Sens. Actuators B 114, 283–295 (2006)

    Article  Google Scholar 

  5. Z. Jiang, M. Yin, C. Wang, Facile synthesis of Ca2+/Au co-doped SnO2 nanofibers and their application in acetone sensor. Mater. Lett. 194, 209–212 (2017)

    Article  Google Scholar 

  6. I. Jimenez, J. Arbiol, G. Dezanneau, A. Cornet, J.R. Morante, Crystalline structure, defects and gas sensor response to NO2 and H2S of tungsten trioxide nanopowders. Sens. Actuators B 93, 475–485 (2003)

    Article  Google Scholar 

  7. B. Cao, J. Chen, X. Tang, W. Zhou, Growth of monoclinic WO3 nanowire array for highly sensitive NO2.. J. Mater. Chem. 19, 2323–2327 (2009)

    Article  Google Scholar 

  8. K.S.W. Sing, D.H. Everett, R.A.W. Haul, L. Moscou, R.A. Pierotti, J. Rouquerol, T. Siemieniewska, Reporting physisorption data for gas/solid system with special reference to the determination of surface area and porosity. Pure Appl. Chem. 57, 603 (1985)

    Article  Google Scholar 

  9. A. Sobhani-Nasab, Z. Zahraei, M. Akbari, M. Maddahfar, S.M. Hosseinpour-Mashkani, Synthesis, characterization, and antibacterial activities of ZnLaFe2O4/NiTiO3 nanocomposite. J. Mol. Struct. 1139, 430–435 (2017)

    Article  Google Scholar 

  10. F. Schüth, Non-siliceous mesostructured and mesoporous materials, Chem. Mater. 13, 3184–3195 (2001)

    Article  Google Scholar 

  11. A. Ziarati, A. Sobhani-Nasab, M. Rahimi-Nasrabadi, M.R. Ganjali, A. Badiei, Sonication method synergism with rare earth based nanocatalyst: preparation of NiFe2–xEuxO4 nanostructures and its catalytic applications for the synthesis of benzimidazoles, benzoxazoles, and benzothiazoles under ultrasonic irradiation. J. Rare Earths 35(4), 374–381 (2017)

    Article  Google Scholar 

  12. Y.-C. Nah, A. Ghicov, D. Kim, P. Schmuki, Enhanced electrochromic properties of self-organized nanoporous WO3. Electrochem. Commun. 10, 1777–1780 (2008)

    Article  Google Scholar 

  13. M. Ramezani, A. Sobhani-Nasab, A. Davoodi, Bismuth selenide nanoparticles: simple synthesis, characterization, and its light harvesting applications in the presence of novel precursor. J. Mater. Sci. Mater. Electron. 26(7), 5440–5445 (2015)

    Article  Google Scholar 

  14. J. Zeng, M. Hu, W. Wang, H. Chen, Y. Qin, NO2 sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film. Sens. Actuators B 161, 447–452 (2012)

    Article  Google Scholar 

  15. M. Choudhary, V.N. Mishra, R. Dwivedi, Effect of processing and palladium doping on the properties of tin oxide based thick film gas sensors. J. Mater. Sci. Mater. Electron. 25, 1331–1340 (2014)

    Article  Google Scholar 

  16. J. Mizsei, L. Pirttiaho, M. Karppinen, V. Lantto, Nanocatalyst sensitizers by agglomeration of nanofilms. Sens. Actuators B 65, 195–198 (2000)

    Article  Google Scholar 

  17. N.M. Vuong, D. Kim, H. Kim, Porous Au-embedded WO3 nanowire structure for efficient detection of CH4 and H2S. Sci. Rep. 5, 11040 (2016)

    Article  Google Scholar 

  18. D. Meng, T. Yamazaki, Y. Shen, Z. Liu, T. Kikuta, Preparation of WO3 nanoparticles and application to NO2 sensor. Appl. Surf. Sci. 256, 1050–1053 (2009)

    Article  Google Scholar 

  19. T.S. Kim, Y.B. Kim, K.S. Yoo, G.S. Sung, H.J. Jung, Sensing characteristics of dc reactive sputtered WO3 thin films as an NOx gas sensor. Sens. Actuators B 62, 102–108 (2000)

    Article  Google Scholar 

  20. F. Di Fonzo, A. Bailini, V. Russo, A. Baserga, D. Cattaneo, M.G. Beghi, P.M. Ossi, C.S. Casari, A. Li Bassi, C.E. Bottani, Synthesis and characterization of tungsten and tungsten oxide nanostructured films. Catal. Today 116, 69–73 (2006)

    Article  Google Scholar 

  21. A. Sobhani-Nasab, H. Naderi, M. Rahimi-Nasrabadi, M.R. Ganjali, Evaluation of supercapacitive behavior of samarium tungstate nanoparticles synthesized via sonochemical method. J. Mater. Sci. Mater. Electron. 28, 8588 (2017)

    Article  Google Scholar 

  22. D. Barrecaa, E. Comini, A. Gasparottoc, C. Maccatoc, C. Sada, G. Sberveglieri, E. Tondello, Chemical vapor deposition of copper oxide films and entangled quasi-1D nanoarchitectures as innovative gas sensors. Sens. Actuators B 141, 270–275 (2009)

    Article  Google Scholar 

  23. Y. Djaoued, P.V. Ashrit, S. Badilescu, R. Brüning, Synthesis and characterization of macroporous tungsten oxide films for electrochromic application. J. Sol-Gel Sci. Technol. 28, 235–244 (2003)

    Article  Google Scholar 

  24. R. Solarska, B.D. Alexander, J. Augustynski, Electrochromic and structural characteristics of mesoporous WO3 films prepared by a sol-gel method. J. Solid State Electrochem. 8, 748–756 (2004)

    Article  Google Scholar 

  25. J. Kukkola, J. Mäklin, N. Halonen, T. Kyllönen, G. Tóth, M. Szabó, A. Shchukarev, J.P. Mikkola, H. Jantunen, K. Kordás, Gas sensors based on anodic tungsten oxide. Sens. Actuators B 153, 293–300 (2011)

    Article  Google Scholar 

  26. H. Tsuchiya, J. M. Macak, I. Sieber, L. Taveira, A. Ghicov, K. Sirotna, P. Schmuki, Self-organized porous WO3 formed in NaF electrolytes. Electrochem. Commun. 7, 295–298 (2005)

    Article  Google Scholar 

  27. Y. Yamaguchi, C. Nemoto, S. Ito, K. Nishio, K. Fujimoto, Improvement of hydrogen gas sensing property of the sol–gel derived Pt/WO3 thin film by Ti-doping. J. Ceram. Soc. Jpn. 123, 1102–1105 (2015)

    Article  Google Scholar 

  28. F. Bíró, C. Dücső, G.Z. Radnóczi, Z. Baji, M. Takács, I. Bársony, ALD nano-catalyst for micro-calorimetric detection of hydrocarbons. Sens. Actuators B 247, 617–625 (2017)

    Article  Google Scholar 

  29. M. Takács, D. Zámbó, A. Deák, A.E. Pap, C. Dücső, WO3 nano-rods sensitized with noble metal nano-particles for H2S sensing in the ppb range. Mater. Res. Bull. 84, 480–485 (2016)

    Article  Google Scholar 

  30. R.L. Puurunen, Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/ water process. J. Appl. Phys. 97, 121301 (2005)

    Article  Google Scholar 

  31. S.M. George, Atomic layer deposition: an overview. Chem. Rev. 110, 111 (2010)

    Article  Google Scholar 

  32. C.T. Campbell, Ultrathin metal films and particles on oxide surfaces: structural, electronic and chemisorptive properties. Surf. Sci. Rep. 27(1), 111 (1997)

    Google Scholar 

  33. L. Vitos, A.V. Ruban, H.L. Skriver, J. Kollar, The surface energy of metals. Surf. Sci. 411, 186 (1998)

    Article  Google Scholar 

  34. F. Biró, C. Dücső, Z. Hajnal, F. Riesz, A.E. Pap, I. Bársony, Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500 °C. Microelectron. J. 45, 1822–1828 (2014)

    Article  Google Scholar 

Download references

Acknowledgements

The authors thank for the assistance of Dr. Zsolt Czigány and Dr. Z. György Radnóczi with HRTEM analysis and Mr. Levente Illés with SEM characterization. The technical support of Ms. Margit Payer and Mr. Attila Nagy is also acknowledged.

Author information

Authors and Affiliations

  1. Research Centre for Energy, Institute for Technical Physics and Materials Science, Konkoly-Thege Miklós út 29-33, Budapest, 1121, Hungary

    Máté Takács, Csaba Dücső & Andrea Edit Pap

  2. Department of Physical Chemistry and Materials Science, Budapest University of Technology and Economics, Műegyetem rkp. 3, Budapest, 1111, Hungary

    Máté Takács

Authors
  1. Máté Takács
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Csaba Dücső
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Andrea Edit Pap
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Máté Takács.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Takács, M., Dücső, C. & Pap, A.E. Nano-structured WO3 layers sensitized with ALD Pt for quick detection of H2S. J Mater Sci: Mater Electron 28, 17148–17155 (2017). https://doi.org/10.1007/s10854-017-7642-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-017-7642-7

Search

Navigation