Skip to main content
SpringerLink
Log in

Microstructures and dielectric properties of inverse-spinel structure Zn2SnO4 thin films by RF magnetron sputtering

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

The dielectric properties of Zn2SnO4 thin films were investigated. Zn2SnO4 thin films were prepared using the radio frequency magnetron sputtering with various depositing times. The X-ray diffraction patterns of the Zn2SnO4 thin films revealed that Zn2SnO4 is the main crystalline phase, which is accompanied by a little SnO2 as the second phase. The average grain size of the Zn2SnO4 thin films in the range from 12.3 to 14.2 nm as the depositing time varied from 60 to 120 min. Dielectric constants (\(\varepsilon_{r}\)) of 19–75 and loss factor of 0.10–0.19 of Zn2SnO4 thin films were measured at 1 MHz with depositing times in the range of 60–120 min.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4

Similar content being viewed by others

References

  1. Y.C. Chen, C.W. Wang, K.H. Chen, Y.D. Huang, Y.C. Chen, Jpn. J. Appl. Phys. 47, 992 (2008)

    Article  Google Scholar 

  2. M. Guo, Y. Li, G. Dou, S. Gong, Mater. Chem. Phys. 147, 728 (2014)

    Article  Google Scholar 

  3. L. Pereira, P. Barquinha, G. Goncalves, A. Vila, A. Olziersky, J. Morante, E. Fortunato, R. Martins, Phys. Status Soildi A 206, 2149 (2009)

    Article  Google Scholar 

  4. Z.L. Pei, L. Pereira, G. Goncalves, P. Barquinha, N. Franco, E. Alves, A.M.B. Rego, R. Martins, E. Fortunatoa, Electrochem. Solid-State Lett. 12, 65 (2009)

    Article  Google Scholar 

  5. Y.C. Chen, Y.N. Wang, C.H. Hsu, J. Alloys Compd. 509, 9650 (2011)

    Article  Google Scholar 

  6. R.C. Pullar, J.D. Breeze, N. McN Alford, Key Eng. Mater. 224, 1 (2002)

    Article  Google Scholar 

  7. S.D. Ramarao, V.R.K. Murthy, Scr. Mater. 69, 274 (2013)

    Article  Google Scholar 

  8. Y.C. Chen, H.M. You, Mater. Chem. Phys. 154, 94 (2015)

    Article  Google Scholar 

  9. Y.C. Chen, M.Z. Weng, J.M. Hong, J. Mater. Sci.: Mater. Electron. 25, 5000 (2014)

    Google Scholar 

  10. Y.C. Chen, C.F. Su, M.Z. Weng, J. Mater. Sci.: Mater. Electron. 25, 2120 (2014)

    Google Scholar 

  11. P. Klung, L.E. Alexander (ed.), in X-ray Diffraction Procedures: For Polycrystalline and Amorphous Materials, 2nd edn. (Wiley, New York, 1974), p. 687

    Google Scholar 

  12. S. Mehraj, M.S. Ansari, Alimuddin, Thin Solid Films 589, 57 (2015)

    Article  Google Scholar 

Download references

Acknowledgments

The authors would like to thank the Ministry of Science and Technology in Taiwan, for financially supporting this research under Contract No. MOST 104-2212-E-262-002.

Author information

Authors and Affiliations

  1. Department of Electrical Engineering, Lunghua University of Science and Technology, Gueishan Shiang, Taoyuan County, Taiwan

    Yih-Chien Chen & Hong-Mine You

Authors
  1. Yih-Chien Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Hong-Mine You
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yih-Chien Chen.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Chen, YC., You, HM. Microstructures and dielectric properties of inverse-spinel structure Zn2SnO4 thin films by RF magnetron sputtering. J Mater Sci: Mater Electron 27, 2031–2035 (2016). https://doi.org/10.1007/s10854-015-3987-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-015-3987-y

Keywords

Search

Navigation