Abstract
This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO2) on flexible Kapton® substrate. LiCoO2 is commonly used as cathode of lithium microbatteries but needs an annealing of 700 °C, which is not compatible with most flexible substrates. LiCoO2 films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton® substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton® and silicon substrates were compared.
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Acknowledgments
This work was financial supported by FEDER/COMPETE and FCT funds with the Project PTDC/EEA-ELC/114713/2009, strategic Project PEst-C/FIS/UI607/2013, PEst-C/QUI/UI0686/2013 and UID/EEA/04436/2013, first author scholarship SFRH/BD/78217/2011 and third author scholarship SFRH/BPD/95905/2013.
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Ribeiro, J.F., Sousa, R., Vieira, E.M.F. et al. Lithium cobalt oxide crystallization on flexible polyimide substrate. J Mater Sci: Mater Electron 27, 631–636 (2016). https://doi.org/10.1007/s10854-015-3798-1
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DOI: https://doi.org/10.1007/s10854-015-3798-1