Distribution of Au atom number in the Au agglomerates generated during the out-diffusion process of supersaturated high-temperature substitutional Au in Si at 900 °C

Abstract

Au atom number in the Au agglomerates generated during the annealing of supersaturated high-temperature substitutional Au in Si at 900 °C are measured by SIMS and their distributions have been investigated. The annealing time is chosen as 22.5, 90 or 360 h, which corresponds to initial, middle or near final stage of the annealing. Many “initial agglomerates” containing about 2.0 × 10⁵ Au atoms are generated and the distributions show an abrupt one with the peak at the atom number in the initial and middle stages. The “initial agglomerates” have absorbed supersaturated Au atoms within 0.86 μm. The “initial agglomerates” are generated even in the near final stage and grow up to containing about 4 × 10⁶ Au atoms by absorbing the Au atoms within 2.3 μm, finally. As the consequence, many agglomerates contain 5 × 10⁴–1.3 × 10⁶ Au atoms resulting in a broad distribution at the near final stage. Schematic models of agglomerations corresponding to each stage are proposed.