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Investigating polysilicon thin film structural changes during rapid thermal annealing of a thin film crystalline silicon on glass solar cell

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Abstract

Structural changes resulting from rapid thermal annealing were investigated in a thin film crystalline silicon on textured glass solar cell, in particular grain parameters and film modulus. Electron backscatter diffraction showed no significant change in grain dimensions post annealing and no preferred orientation. Columnar grains with large defect densities were visible in transmission electron microscopy with no qualitative change visible post annealing. A similar modulus obtained by nanoindenation, both pre and post annealing suggests no quantitative structural change. The film structure appears unchanged by rapid thermal annealing.

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Acknowledgments

The Photovoltaic Centre of Excellence is supported under the Australian Research Council Centre of Excellence Scheme.

Thanks to Prof. Paul Monroe of UNSW for training on the TEM, Dr. M. Z. Quadir for his many helpful discussions, training and assistance with TEM work. A mention and thanks to Dr. Rajnish Singh, Dr Philip Boughton and Pranesh Dayal for their technical training and demonstrations using the Hysitron system. Finally thanks are due to Dr. Mark Keevers of CSG Solar for the provision of sample material without which this work could not have been completed.

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  1. ARC Photovoltaics Centre of Excellence, University of New South Wales, Sydney, NSW, 2052, Australia

    Ian Brazil & Martin A. Green

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  1. Ian Brazil
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  2. Martin A. Green
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Correspondence to Ian Brazil.

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Brazil, I., Green, M.A. Investigating polysilicon thin film structural changes during rapid thermal annealing of a thin film crystalline silicon on glass solar cell. J Mater Sci: Mater Electron 21, 994–999 (2010). https://doi.org/10.1007/s10854-010-0062-6

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  • DOI: https://doi.org/10.1007/s10854-010-0062-6

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