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SEM characterization of CdTe growth on CdTe(111) by close-spaced sublimation

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Abstract

A close-spaced sublimation (CSS) reactor is used to explore the growth of CdTe thin films on CdTe(111) substrates in order to determine the parameters required for high quality smooth film growth. Growth rates below 1 μm/h were targeted based on a preliminary sublimation study of the substrate material. The CSS technique is of interest due to its low cost and the potential for producing high quality films at higher growth rates compared to molecular beam epitaxy (MBE). Films were characterized by optical and scanning electron microscopy (SEM), atomic force microscopy (AFM), and the film thickness was determined using an alpha-step IQ profilometer. The initial quality of the films was determined by the electron back scattering diffraction (EBSD) technique.

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Acknowledgments

This material is based upon work supported by the Texas Instruments Foundation and the National Science Foundation under Grant No. 0245071.

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Authors and Affiliations

  1. Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX, 79968, USA

    Stella A. Quiñones, Skanda M. Ammu, Arev Escobedo, Mario Rodriguez, Jose Cruz-Campa & David Zubia

  2. Metallurgical and Materials Engineering, The University of Texas at El Paso, El Paso, TX, 79968, USA

    John McClure

Authors
  1. Stella A. Quiñones
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  2. Skanda M. Ammu
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  3. Arev Escobedo
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  4. Mario Rodriguez
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  7. David Zubia
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Correspondence to Stella A. Quiñones.

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Quiñones, S.A., Ammu, S.M., Escobedo, A. et al. SEM characterization of CdTe growth on CdTe(111) by close-spaced sublimation. J Mater Sci: Mater Electron 18, 1085–1091 (2007). https://doi.org/10.1007/s10854-007-9211-y

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  • DOI: https://doi.org/10.1007/s10854-007-9211-y

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