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Piezoelectric and optical properties of ZnO thin films deposited using various O2/(Ar+O2) gas ratios

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Abstract

In this study, ZnO thin films were fabricated on a Pt(111)/TiOx/SiO2/Si substrate using the RF magnetron sputtering method. Then, the effect of the crystallization orientation and microstructure on the piezoelectric and optical properties of the ZnO thin film was investigated for various O2/(Ar+O2) gas ratios. When the O2/(Ar+O2) gas ratio was 50%, the intensity of the (002) peak corresponding to the preferred orientation of the ZnO thin film was a maximum and the minimum FWHM value of 0.56° was observed. The surface roughness of the ZnO thin film measured using AFM also had a minimum value of 16.43 °C at an O2/(Ar+O2) gas ratio of 50%. The piezoelectric characteristics of the ZnO thin film were measured using the pneumatic loading method (PLM) and the corresponding constant had the largest value of 11.9 pC/N at an O2/(Ar+O2) gas ratio of 50%. The transmittance of the ZnO thin film obtained from the transmittance curve using a spectrophotometer was slightly greater than 80% in the human visible light region at an O2/(Ar+O2) gas ratio of 50%. By using the refractive index data obtained from the transmittance curve and the Sellmeir dispersion relation, we can also predict the refractive index at a wavelength of 400 nm. When the O2/(Ar+O2) gas ratio was 50%, the refractive index was 2.043 and, at other gas ratios, the corresponding refractive indices were 2.004∼2.006. The band gap energies of the ZnO thin film were 3.27∼3.33 eV depending on the O2/(Ar+O2) gas ratio and were little affected by the variation of the oxygen inflow volume.

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Authors and Affiliations

  1. Department of Electrical & Semiconductor Engineering, Chonnam National University, Yosu, 550-749, South Korea

    Seong Jun Kang & Yang Hee Joung

  2. Research Group for Intelligent U-Logistics Technology, Inha University, Incheon, 402-751, South Korea

    Dong Hoon Chang

  3. Memory R&D Division, Hynix Semiconductor Inc., 1, Hyangjeong-dong Hungduk-gu, Cheongju-si, 361-725, South Korea

    Kyoung Won Kim

Authors
  1. Seong Jun Kang
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  2. Yang Hee Joung
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Correspondence to Seong Jun Kang.

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Kang, S.J., Joung, Y.H., Chang, D.H. et al. Piezoelectric and optical properties of ZnO thin films deposited using various O2/(Ar+O2) gas ratios. J Mater Sci: Mater Electron 18, 647–653 (2007). https://doi.org/10.1007/s10854-007-9142-7

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  • DOI: https://doi.org/10.1007/s10854-007-9142-7

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