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Aluminum doped ZnO by reactive sputtering of coaxial Zn and Al metallic targets

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Abstract

Transparent films of aluminum doped zinc oxide were obtained by reactive sputtering employing metallic zinc and aluminum targets. The targets were coaxially superposed in a single magnetron, by using a center hollow aluminum plate. Two different hole radii in the aluminum target were employed trying to modify the aluminum content. Sputtering power was kept constant at 50 W and temperature was set to 300, 400 and 500 °C. Oxygen partial pressure was 20 and 40% in argon. Film transparencies up to 85% were obtained using this method. X-ray diffraction and Raman spectroscopy measurements were performed to monitor the crystalline structure of the films. Sample resistance was determined by current voltage measurements.

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References

  1. S. Zhu, C-H. Su, S.L. Lehoczky, M.A. George, D.H. Lowndes, J. Mater. Res. 15, 1125 (2000)

    CAS  Google Scholar 

  2. M. Birkholz, B. Selle, F. Fenske, W. Fuhs, Phys. Rev. B 68, 205414 (2003)

    Article  Google Scholar 

  3. M. Chen, Z.L. Pei, C. Sun, J. Gong, R.F. Huang, L.S. Wen, Mater. Sci. Eng. B 85, 212 (2001)

    Article  Google Scholar 

  4. J.F. Chang, H.H. Kuo, I.C. Leu, M.H. Hon, Sensors and Actuators B 84, 258 (2002)

    Article  Google Scholar 

  5. K.F. Cai, E. Müller, C. Drasar, A. Mrotzek, Mater. Sci. Eng. B 104, 45 (2003)

    Article  Google Scholar 

  6. M. Chen, Z.L. Pei, X. Wang, C. Sun, L.S. Wen, J. Mater. Res. 16, 2118 (2001)

    CAS  Google Scholar 

  7. Powder Diffraction File # 05-0664; JCPDS-International Centre for Diffraction Data (1996)

  8. Powder Diffraction File # 23-1490; JCPDS-International Centre for Diffraction Data (1996)

  9. M. Tzolov, N. Tzenov, D. Dimova-Malinovska, M. Kalitzova, C. Pizzuto, G. Vitali, G. Zollo, I. Ivanov, Thin Solid Films 379, 28 (2000)

    Article  CAS  Google Scholar 

  10. C. Bundesmann, N. Ashkenov, M. Schubert, D. Spemann, T. Butz, E.M. Kaidashev, M. Lorenz, M. Grundmann, Appl. Phys. Lett. 83, 1974 (2003)

    Article  CAS  Google Scholar 

Download references

Acknowledgements

Authors gratefully thank R. Fregoso, M. Guerrero, Ana B. Soto and F. Melgarejo for technical assistance. As well as partial financial support by CONACyT (México). One of the authors (MASA) gratefully thanks CONACyT for financial support through program Retención.

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Authors and Affiliations

  1. Departamento de Física, CUCEI – Universidad de Guadalajara, Blvd. M. García Barragán 1421, Guadalajara, Jal, 44430, Mexico

    M. A. Santana-Aranda, C. R. Michel & A. Chávez-Chávez

  2. Departamento de Ciencias Básicas, UAM-Azcapotzalco, Av. San Pablo 180, Mexico, DF, 02200, Mexico

    A. Armenta-Estrada

  3. Centro de Investigación en Micro y Nanotecnología, Universidad Veracruzana, Av. Ruiz Cortines 455 , Boca del Río, Ver, 94294, Mexico

    C. Mendoza-Barrera

  4. Departamento de Materiales, Centro de Investigación y Estudios Avanzados – IPN, Apartado Postal 1-798, Querétaro, Qro, 76001, Mexico

    S. Jiménez-Sandoval

  5. Departamento de Física, Centro de Investigación y Estudios Avanzados – IPN, P.O. Box 14-740, Mexico, DF, 07000, Mexico

    M. Meléndez-Lira

Authors
  1. M. A. Santana-Aranda
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  2. A. Armenta-Estrada
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  3. C. Mendoza-Barrera
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  4. C. R. Michel
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  5. A. Chávez-Chávez
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  6. S. Jiménez-Sandoval
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  7. M. Meléndez-Lira
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Correspondence to M. A. Santana-Aranda.

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Santana-Aranda, M.A., Armenta-Estrada, A., Mendoza-Barrera, C. et al. Aluminum doped ZnO by reactive sputtering of coaxial Zn and Al metallic targets. J Mater Sci: Mater Electron 18, 611–614 (2007). https://doi.org/10.1007/s10854-006-9115-2

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  • DOI: https://doi.org/10.1007/s10854-006-9115-2

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